-
公开(公告)号:CN104885206B
公开(公告)日:2018-03-30
申请号:CN201380066872.1
申请日:2013-12-20
Applicant: 三菱综合材料株式会社
CPC classification number: H05K7/02 , B23K35/0272 , B23K35/26 , B23K35/262 , B23K35/302 , B23K2101/40 , B23K2101/42 , B32B15/017 , C22C13/00 , H01L23/3735 , H01L23/473 , H01L23/488 , H01L24/29 , H01L24/32 , H01L24/83 , H01L2224/29111 , H01L2224/32225 , H01L2224/83455 , H01L2224/83801 , H01L2924/01322 , H01L2924/0133 , H01L2924/13055 , H01L2924/351 , H01L2924/00 , H01L2924/01028 , H01L2924/01029 , H01L2924/0105
Abstract: 本发明的功率模块中,在电路层(12)中与半导体元件(3)的接合面,设置有由铜或铜合金构成的铜层,且在电路层(12)与半导体元件(3)之间形成有使用焊锡材料而形成的焊锡层(20)。在焊锡层(20)中的从电路层(12)表面至厚度30μm的区域中,通过EBSD测定而测定的平均结晶粒径被设定为10μm以下,焊锡层(20)的组成为,作为主成分含有Sn,并且含有0.01质量%以上1.0质量%以下的Ni、0.1质量%以上5.0质量%以下的Cu,在功率循环试验中,在通电时间5秒、温度差80℃的条件下负载10万次功率循环时,热阻上升率低于10%。
-
公开(公告)号:CN104835746B
公开(公告)日:2017-12-15
申请号:CN201510071017.0
申请日:2015-02-10
Applicant: 英飞凌科技股份有限公司
IPC: H01L21/56 , H01L21/60 , H01L23/498 , H01L23/31
CPC classification number: H01L24/83 , H01L21/4832 , H01L21/561 , H01L21/568 , H01L21/78 , H01L23/49513 , H01L23/49541 , H01L23/49562 , H01L23/562 , H01L24/05 , H01L24/19 , H01L24/20 , H01L24/24 , H01L24/29 , H01L24/32 , H01L24/73 , H01L24/82 , H01L24/92 , H01L24/97 , H01L2224/04026 , H01L2224/04105 , H01L2224/05082 , H01L2224/05083 , H01L2224/05124 , H01L2224/05147 , H01L2224/05155 , H01L2224/05166 , H01L2224/05639 , H01L2224/06181 , H01L2224/24246 , H01L2224/27831 , H01L2224/291 , H01L2224/29109 , H01L2224/29111 , H01L2224/29147 , H01L2224/2918 , H01L2224/2926 , H01L2224/29393 , H01L2224/32245 , H01L2224/73267 , H01L2224/82031 , H01L2224/82039 , H01L2224/83005 , H01L2224/83192 , H01L2224/83203 , H01L2224/83447 , H01L2224/83455 , H01L2224/83801 , H01L2224/8382 , H01L2224/83825 , H01L2224/8384 , H01L2224/8385 , H01L2224/83931 , H01L2224/92244 , H01L2224/97 , H01L2924/01013 , H01L2924/12042 , H01L2924/13055 , H01L2924/13091 , H01L2924/181 , H01L2924/2064 , H01L2924/20641 , H01L2924/20642 , H01L2924/20644 , H01L2924/3511 , H01L2924/00 , H01L2224/82 , H01L2224/83 , H01L2224/19 , H01L2924/014 , H01L2924/00014 , H01L2924/01079 , H01L2924/01029 , H01L2924/0105 , H01L2924/01047 , H01L2924/01006 , H01L2924/01023
Abstract: 具有被结合到金属箔的半导体管芯的半导体模块。一种制造半导体模块的方法包括提供包括被附着于金属层的金属箔的金属复合材料衬底,该金属箔比金属层更薄且包括与之不同的材料,在将金属箔结构化之前将多个半导体管芯的第一表面附着于金属箔,并将被附着于金属箔的半导体管芯装入电绝缘材料中。在用电绝缘材料包住半导体管芯之后将金属层和金属箔结构化,使得电绝缘材料的表面区没有金属箔和金属层。沿着没有金属箔和金属层的表面区划分电绝缘材料以形成单个模块。
-
公开(公告)号:CN107262958A
公开(公告)日:2017-10-20
申请号:CN201710589627.9
申请日:2014-09-05
Applicant: 株式会社东芝
IPC: B23K35/26 , B23K35/28 , B23K35/30 , B23K35/32 , B23K35/36 , B23K35/362 , B23K35/24 , B22F1/00 , C22C1/04 , H01L23/373 , H01L21/48 , H01L23/488
CPC classification number: B23K35/025 , B22F1/0003 , B22F1/0018 , B22F1/0074 , B22F2999/00 , B23K35/24 , B23K35/262 , B23K35/264 , B23K35/282 , B23K35/286 , B23K35/30 , B23K35/3006 , B23K35/3013 , B23K35/302 , B23K35/3033 , B23K35/32 , B23K35/322 , B23K35/325 , B23K35/3601 , B23K35/362 , C22C1/0491 , C22C5/06 , H01L21/4867 , H01L23/3737 , H01L24/05 , H01L24/27 , H01L24/29 , H01L24/32 , H01L24/83 , H01L2224/0381 , H01L2224/04026 , H01L2224/05611 , H01L2224/05639 , H01L2224/05644 , H01L2224/05647 , H01L2224/05655 , H01L2224/05664 , H01L2224/05669 , H01L2224/27003 , H01L2224/271 , H01L2224/2732 , H01L2224/2741 , H01L2224/2744 , H01L2224/29006 , H01L2224/29294 , H01L2224/29313 , H01L2224/29318 , H01L2224/29324 , H01L2224/29339 , H01L2224/29344 , H01L2224/29347 , H01L2224/29355 , H01L2224/2936 , H01L2224/29364 , H01L2224/29369 , H01L2224/29371 , H01L2224/29372 , H01L2224/29373 , H01L2224/29376 , H01L2224/29378 , H01L2224/2938 , H01L2224/2949 , H01L2224/32225 , H01L2224/32245 , H01L2224/325 , H01L2224/32503 , H01L2224/32507 , H01L2224/83075 , H01L2224/83192 , H01L2224/832 , H01L2224/83203 , H01L2224/83205 , H01L2224/8322 , H01L2224/83411 , H01L2224/83439 , H01L2224/83444 , H01L2224/83447 , H01L2224/83455 , H01L2224/83464 , H01L2224/83469 , H01L2224/8384 , H01L2924/01102 , H01L2924/10253 , H01L2924/10254 , H01L2924/10272 , H01L2924/1033 , H01L2924/1067 , H01L2924/12044 , H01L2924/15787 , H01L2924/0543 , H01L2924/01031 , H01L2924/00014 , H01L2924/00012 , H01L2924/00 , B22F1/0022
Abstract: 本发明提供了包含极性溶剂、分散在所述极性溶剂中且包含第一金属的粒子、和溶解在所述极性溶剂中且与所述第一金属不同的第二金属的金属粒子膏糊,所述极性溶剂选自由醇、二醇醚、酯、氨基化合物、脂肪族烃、和芳香族烃组成的组中,所述第二金属以有机金属化合物或盐的形式添加。本发明还提供了使用了该金属粒子膏糊的固化物及半导体装置。
-
公开(公告)号:CN102437130B
公开(公告)日:2016-08-03
申请号:CN201110375028.X
申请日:2007-11-20
Applicant: 株式会社日立制作所
CPC classification number: H01L23/49582 , B23K20/02 , B23K20/04 , B23K35/0238 , B32B15/017 , H01L24/27 , H01L24/29 , H01L24/32 , H01L24/48 , H01L24/73 , H01L24/743 , H01L24/83 , H01L2224/291 , H01L2224/29111 , H01L2224/32225 , H01L2224/32245 , H01L2224/48091 , H01L2224/48137 , H01L2224/48247 , H01L2224/73265 , H01L2224/83101 , H01L2224/83455 , H01L2224/83801 , H01L2224/83805 , H01L2924/00014 , H01L2924/01006 , H01L2924/01009 , H01L2924/01012 , H01L2924/01013 , H01L2924/01015 , H01L2924/01027 , H01L2924/01029 , H01L2924/0103 , H01L2924/01032 , H01L2924/01033 , H01L2924/01047 , H01L2924/0105 , H01L2924/01074 , H01L2924/01075 , H01L2924/01078 , H01L2924/01079 , H01L2924/01082 , H01L2924/0132 , H01L2924/01322 , H01L2924/0133 , H01L2924/014 , H01L2924/13055 , H01L2924/15747 , H01L2924/181 , H01L2924/351 , Y10T428/12736 , Y10T428/31678 , H01L2924/01014 , H01L2924/00 , H01L2924/00012 , H01L2924/01083 , H01L2924/3512 , H01L2224/45099 , H01L2224/05599
Abstract: 本发明提供一种半导体装置及其制造方法,该半导体装置具有第一部件、第二部件以及将所述第一部件和所述第二部件接合的连接材料。所述连接材料具有:Al系层、在所述Al系层和所述第一部件之间设置的第一Zn-Al系层以及在所述Al系层和所述第二部件之间设置的第二Zn-Al系层。通过使用该连接材料,在连接时能够抑制连接材料的表面的Al氧化膜的形成,能够得到用Zn-Al合金不能得到的良好的浸润性。另外,在接合后存留有Al系合金层的场合,由于柔软的Al作为应力缓冲材料发挥功能,所以能够得到很高的接合可靠性。
-
公开(公告)号:CN105722633A
公开(公告)日:2016-06-29
申请号:CN201480060594.3
申请日:2014-11-10
Applicant: 株式会社电装
IPC: B23K26/00 , B23K26/359 , H01L21/50 , H01L21/52
CPC classification number: B23K26/359 , B23K26/00 , B23K26/0006 , B23K26/0626 , B23K26/354 , B23K26/355 , B23K26/3584 , B23K2101/40 , B23K2103/08 , H01L21/4821 , H01L23/3107 , H01L23/3142 , H01L23/49513 , H01L23/49541 , H01L23/49548 , H01L23/49582 , H01L24/32 , H01L2224/291 , H01L2224/29139 , H01L2224/29144 , H01L2224/29155 , H01L2224/29164 , H01L2224/2919 , H01L2224/32245 , H01L2224/83385 , H01L2224/83439 , H01L2224/83444 , H01L2224/83455 , H01L2224/83464 , H01L2924/40102 , H01L2924/014 , H01L2924/00014
Abstract: 本发明的目的在于通过较以往为低能量密度的能量束来形成能够确保金属构件与其他构件的密合性的粗糙面或者可以抑制金属构件中的软钎料的扩散的粗糙面。本发明的基材(21)的表面上设有金属薄膜(22)的金属构件(2)的表面加工方法具有通过对所述金属薄膜的表面(22a)以脉冲宽度为1μ秒以下照射能量密度为100J/cm2以下的脉冲振荡的激光束、从而使所述金属薄膜的表面部分熔融或蒸发、在所述熔融或蒸发之后使所述金属薄膜的表面部分凝固、从而将所述金属薄膜的表面进行粗糙化,所述金属薄膜由以Ni、Au、Pd、Ag中的至少1种为主成分的材料所构成。
-
公开(公告)号:CN105531075A
公开(公告)日:2016-04-27
申请号:CN201480050538.1
申请日:2014-08-27
Applicant: 住友金属矿山株式会社
Inventor: 永田浩章
CPC classification number: H05K3/3457 , B23K35/26 , B23K35/264 , C22C1/02 , C22C1/03 , C22C12/00 , H01L24/29 , H01L24/32 , H01L24/48 , H01L24/73 , H01L24/83 , H01L2224/29113 , H01L2224/32245 , H01L2224/48091 , H01L2224/48247 , H01L2224/73265 , H01L2224/83455 , H01L2224/83815 , H01L2924/00014 , H01L2924/01322 , H01L2924/15747 , H01L2924/181 , H01L2924/351 , H05K1/09 , H05K1/181 , H05K3/341 , H01L2224/45099 , H01L2924/01013 , H01L2924/01047 , H01L2924/01032 , H01L2924/01015 , H01L2924/0105 , H01L2924/0103 , H01L2924/01052 , H01L2924/01028 , H01L2924/01029 , H01L2924/013 , H01L2924/20107 , H01L2924/00012 , H01L2924/00
Abstract: 本发明提供一种在Bi-Ag中含有特定量的Al,使含Ag与Al的金属间化合物的粒子分散在钎料合金内而形成的Bi基钎料合金,和使用该Bi基钎料合金的经镀Ag处理的电子部件或裸Cu框架电子部件或经镀Ni处理的电子部件等的接合方法,以及电子部件安装基板。还提供一种Bi基钎料合金等,其特征在于,其为含有Ag和Al,实质上不含有Pb,Bi的含有率在80质量%以上,并且熔点的固相线在265℃以上,液相线在390℃以下的Bi基钎料合金,Ag的含量为0.6-18质量%,而且,Al的含量为0.1-3质量%并且为Ag的含量的1/20-1/2,使含有Ag与Al的金属间化合物的粒子分散在钎料合金内而形成。
-
公开(公告)号:CN103153527B
公开(公告)日:2015-12-09
申请号:CN201180048365.6
申请日:2011-08-03
Applicant: 千住金属工业株式会社
IPC: B23K35/14 , B22F3/26 , B23K1/00 , B23K35/26 , B23K35/30 , B23K35/40 , C22C9/02 , C22C13/00 , H01L21/52 , H05K3/34 , B23K101/40
CPC classification number: B23K35/262 , B22F2998/00 , B23K35/025 , B23K35/302 , B23K2101/40 , C22C1/08 , C22C9/02 , C22C13/00 , H01L23/3735 , H01L24/07 , H01L24/29 , H01L24/32 , H01L24/45 , H01L24/48 , H01L24/73 , H01L24/83 , H01L2224/04042 , H01L2224/29 , H01L2224/29101 , H01L2224/2919 , H01L2224/29198 , H01L2224/2929 , H01L2224/29299 , H01L2224/32014 , H01L2224/32225 , H01L2224/45144 , H01L2224/48091 , H01L2224/48227 , H01L2224/48472 , H01L2224/73265 , H01L2224/83065 , H01L2224/8309 , H01L2224/83444 , H01L2224/83455 , H01L2224/83801 , H01L2224/8384 , H01L2924/00013 , H01L2924/01004 , H01L2924/01005 , H01L2924/01006 , H01L2924/01014 , H01L2924/01021 , H01L2924/01028 , H01L2924/01029 , H01L2924/0103 , H01L2924/01033 , H01L2924/01047 , H01L2924/0105 , H01L2924/01051 , H01L2924/01078 , H01L2924/01079 , H01L2924/01082 , H01L2924/0132 , H01L2924/01322 , H01L2924/01327 , H01L2924/014 , H01L2924/0665 , H01L2924/10253 , H01L2924/15747 , H01L2924/203 , H05K3/3463 , H05K2201/0116 , Y10T428/12479 , H01L2924/00014 , C22C1/0483 , H01L2924/00 , H01L2924/00012 , H01L2224/29099 , H01L2224/29199 , H01L2924/0002
Abstract: 本发明提供一种半导体装置,其将接合材料用于半导体装置的内部接合用,从而在基板安装时内部接合部不熔融,所述接合材料是由Sn或Sn系焊料合金填充到具有网眼结构的多孔金属体的空孔部分且覆盖其表面而得到的。
-
公开(公告)号:CN102623425B
公开(公告)日:2015-08-19
申请号:CN201210018556.4
申请日:2012-01-20
Applicant: 英飞凌科技股份有限公司
IPC: H01L23/488 , H01L21/60
CPC classification number: H01L25/074 , H01L21/56 , H01L23/49517 , H01L23/49575 , H01L24/05 , H01L24/06 , H01L24/24 , H01L24/29 , H01L24/32 , H01L24/48 , H01L24/73 , H01L24/82 , H01L24/83 , H01L24/92 , H01L25/16 , H01L2224/04026 , H01L2224/04042 , H01L2224/05571 , H01L2224/05624 , H01L2224/05639 , H01L2224/05644 , H01L2224/05647 , H01L2224/05655 , H01L2224/05664 , H01L2224/05666 , H01L2224/05671 , H01L2224/06181 , H01L2224/24137 , H01L2224/24246 , H01L2224/24247 , H01L2224/29111 , H01L2224/29139 , H01L2224/29144 , H01L2224/29147 , H01L2224/2929 , H01L2224/29339 , H01L2224/29344 , H01L2224/29347 , H01L2224/29355 , H01L2224/32145 , H01L2224/32225 , H01L2224/32245 , H01L2224/48091 , H01L2224/48137 , H01L2224/48145 , H01L2224/48227 , H01L2224/48247 , H01L2224/73265 , H01L2224/73267 , H01L2224/8203 , H01L2224/83191 , H01L2224/83192 , H01L2224/83193 , H01L2224/83439 , H01L2224/83447 , H01L2224/83455 , H01L2224/8346 , H01L2224/83801 , H01L2224/83815 , H01L2224/8382 , H01L2224/8384 , H01L2224/92244 , H01L2224/92247 , H01L2924/00014 , H01L2924/01029 , H01L2924/1305 , H01L2924/13055 , H01L2924/1306 , H01L2924/13062 , H01L2924/13091 , H01L2924/14 , H01L2924/1461 , H01L2924/1532 , H01L2924/181 , H01L2924/30107 , H01L2924/3512 , H01L2924/00 , H01L2924/00012 , H01L2924/01023 , H01L2924/01028 , H01L2924/01015 , H01L2924/0105 , H01L2924/01049 , H01L2924/01014 , H01L2924/01082 , H01L2924/01047 , H01L2924/01051 , H01L2224/05552 , H01L2224/45099 , H01L2224/45015 , H01L2924/207
Abstract: 本发明涉及包括两个半导体芯片的器件及其制造。一种器件包括:第一半导体芯片,在第一面上具有第一接触垫;以及第二半导体芯片,在第一面上具有第一接触垫。所述第二半导体芯片被放置在所述第一半导体芯片之上,其中,所述第一半导体芯片的第一面面向所述第二半导体芯片的第一面。唯一导电材料层被布置在所述第一半导体芯片与所述第二半导体芯片之间。唯一导电材料层将所述第一半导体芯片的第一接触垫电耦合至所述第二半导体芯片的第一接触垫。
-
公开(公告)号:CN104838488A
公开(公告)日:2015-08-12
申请号:CN201380063755.X
申请日:2013-12-04
Applicant: 三菱综合材料株式会社
CPC classification number: H05K1/0306 , B23K1/0016 , B23K35/025 , B23K35/3006 , C04B35/645 , C04B37/026 , C04B2235/656 , C04B2235/6565 , C04B2237/121 , C04B2237/122 , C04B2237/125 , C04B2237/126 , C04B2237/127 , C04B2237/128 , C04B2237/343 , C04B2237/402 , C04B2237/407 , C04B2237/60 , C04B2237/704 , C04B2237/706 , C04B2237/708 , H01L21/4807 , H01L21/4882 , H01L23/15 , H01L23/3672 , H01L23/3735 , H01L23/42 , H01L23/4336 , H01L24/29 , H01L24/32 , H01L24/83 , H01L2224/29111 , H01L2224/32225 , H01L2224/83455 , H01L2224/83801 , H01L2924/01322 , H05K1/021 , H05K1/18 , H05K3/303 , H05K3/388 , H05K2203/04 , H05K2203/1194 , H01L2924/01047 , H01L2924/01029 , H01L2924/01049
Abstract: 本发明所涉及的功率模块用基板为在陶瓷基板(11)的表面层叠由铜或铜合金构成的铜板并接合的功率模块用基板,在铜板与陶瓷基板(11)之间,氧化物层(31)形成于陶瓷基板(11)的表面,并且Ag-Cu共晶组织层(32)的厚度被设为15μm以下。
-
公开(公告)号:CN102549738B
公开(公告)日:2015-07-01
申请号:CN201080043795.4
申请日:2010-05-18
Applicant: 丰田自动车株式会社
Inventor: 大野裕孝
CPC classification number: H01L23/492 , C23C24/04 , H01L21/4875 , H01L24/05 , H01L24/27 , H01L24/29 , H01L24/32 , H01L24/743 , H01L24/83 , H01L2224/04026 , H01L2224/05655 , H01L2224/26175 , H01L2224/27013 , H01L2224/29099 , H01L2224/291 , H01L2224/32225 , H01L2224/32245 , H01L2224/33505 , H01L2224/83007 , H01L2224/83101 , H01L2224/83193 , H01L2224/83385 , H01L2224/83411 , H01L2224/83447 , H01L2224/83455 , H01L2224/83815 , H01L2924/01004 , H01L2924/01006 , H01L2924/01013 , H01L2924/01029 , H01L2924/01033 , H01L2924/01047 , H01L2924/0105 , H01L2924/01079 , H01L2924/014 , H01L2924/12042 , H01L2924/1305 , H01L2924/13055 , H01L2924/00 , H01L2924/013 , H01L2924/00014
Abstract: 本发明的半导体装置(1)的目的在于以低廉的价格形成防止焊料流动的构造,所述半导体装置(1)的特征在于,半导体元件(11)经由焊料层(13)接合在基板(12)上,并且所述半导体装置(1)具有通过围绕焊料层(13)的周围来防止焊料在焊接时流动的流出防止部(15),所述流出防止部(15)通过冷喷法形成,其表面处于被氧化的状态。
-
-
-
-
-
-
-
-
-