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公开(公告)号:CN103548129A
公开(公告)日:2014-01-29
申请号:CN201180071145.5
申请日:2011-08-30
Applicant: EV集团E·索尔纳有限责任公司
IPC: H01L21/60 , H01L23/488
CPC classification number: H01L21/76251 , B23K20/021 , B23K20/023 , B23K35/001 , B23K35/0255 , B23K35/262 , B23K35/302 , B23K2101/40 , H01L21/185 , H01L24/05 , H01L24/08 , H01L24/27 , H01L24/29 , H01L24/32 , H01L24/83 , H01L24/94 , H01L25/0657 , H01L25/50 , H01L2224/038 , H01L2224/0384 , H01L2224/04026 , H01L2224/05557 , H01L2224/05647 , H01L2224/0801 , H01L2224/08501 , H01L2224/2745 , H01L2224/27452 , H01L2224/275 , H01L2224/27505 , H01L2224/278 , H01L2224/2784 , H01L2224/29019 , H01L2224/2908 , H01L2224/29111 , H01L2224/29124 , H01L2224/29144 , H01L2224/29147 , H01L2224/29166 , H01L2224/29181 , H01L2224/29184 , H01L2224/29211 , H01L2224/29311 , H01L2224/29347 , H01L2224/3201 , H01L2224/325 , H01L2224/32501 , H01L2224/7565 , H01L2224/83013 , H01L2224/83022 , H01L2224/83191 , H01L2224/83193 , H01L2224/83203 , H01L2224/83345 , H01L2224/83365 , H01L2224/83385 , H01L2224/838 , H01L2224/8383 , H01L2224/8384 , H01L2224/94 , H01L2924/01029 , H01L2924/01327 , H01L2924/1434 , H01L2924/351 , H01L2924/3511 , H01L2924/0105 , H01L2224/83
Abstract: 本发明涉及用于使第一固体衬底(1)与含有第一材料的第二固体衬底(2)粘合的方法,该方法通过下面的步骤,尤其是下面的顺序进行:-在第二固体衬底(2)上形成或施加含有第二材料的功能层(5),-使第一固体衬底(1)与第二固体衬底(2)在功能层(5)上接触,-将固体衬底(1、2)一起压制用于在第一和第二固体衬底(1、2)之间形成永久粘合,该粘合通过第一材料与第二材料的固体扩散和/或相变至少部分地得到增强,其中在功能层(5)上产生体积增加。在粘合过程中,没有或仅仅稍微超出了第一材料对第二材料的溶解度极限,从而尽可能避免金属间相的沉积并与此相反地形成混合晶体。第一材料可以是铜,而第二材料可以是锡。
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公开(公告)号:CN102637610A
公开(公告)日:2012-08-15
申请号:CN201210029734.3
申请日:2012-02-10
Applicant: 英飞凌科技股份有限公司
CPC classification number: H01L24/81 , H01L23/3107 , H01L23/49513 , H01L24/03 , H01L24/05 , H01L24/06 , H01L24/27 , H01L24/29 , H01L24/32 , H01L24/48 , H01L24/73 , H01L24/83 , H01L24/93 , H01L2224/0345 , H01L2224/03452 , H01L2224/04026 , H01L2224/04042 , H01L2224/0508 , H01L2224/05082 , H01L2224/05124 , H01L2224/05139 , H01L2224/05144 , H01L2224/05155 , H01L2224/05164 , H01L2224/05166 , H01L2224/05169 , H01L2224/05171 , H01L2224/05184 , H01L2224/05624 , H01L2224/05639 , H01L2224/05644 , H01L2224/05647 , H01L2224/05655 , H01L2224/05664 , H01L2224/05666 , H01L2224/05669 , H01L2224/05671 , H01L2224/05684 , H01L2224/06181 , H01L2224/27426 , H01L2224/2745 , H01L2224/29018 , H01L2224/29019 , H01L2224/29109 , H01L2224/29111 , H01L2224/29139 , H01L2224/29144 , H01L2224/29147 , H01L2224/32225 , H01L2224/32245 , H01L2224/48091 , H01L2224/48247 , H01L2224/73265 , H01L2224/83191 , H01L2224/83203 , H01L2224/83345 , H01L2224/8381 , H01L2224/83898 , H01L2224/83906 , H01L2224/93 , H01L2924/00014 , H01L2924/01029 , H01L2924/01322 , H01L2924/01327 , H01L2924/12042 , H01L2924/1305 , H01L2924/13055 , H01L2924/1306 , H01L2924/13062 , H01L2924/13091 , H01L2924/1461 , H01L2924/15787 , H01L2924/181 , H01L2924/351 , H01L2924/00012 , H01L2924/3512 , H01L2924/00 , H01L2924/01023 , H01L2924/0105 , H01L2924/01049 , H01L2224/27 , H01L2224/45099 , H01L2224/45015 , H01L2924/207
Abstract: 本发明涉及用于在载体上安装半导体芯片的方法。一种方法包括提供具有第一主表面和沉积在第一主表面上的焊料层的半导体芯片,其中所述焊料层具有至少1μm的粗糙度。将半导体芯片放置在载体上,其中半导体芯片的第一主表面面向所述载体。以第一主表面的每mm2的表面积至少1牛顿的压力将半导体芯片按压在所述载体上,并且对焊料施加热量。
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公开(公告)号:CN103548129B
公开(公告)日:2017-05-10
申请号:CN201180071145.5
申请日:2011-08-30
Applicant: EV 集团 E·索尔纳有限责任公司
IPC: H01L21/60 , H01L23/488
CPC classification number: H01L21/76251 , B23K20/021 , B23K20/023 , B23K35/001 , B23K35/0255 , B23K35/262 , B23K35/302 , B23K2101/40 , H01L21/185 , H01L24/05 , H01L24/08 , H01L24/27 , H01L24/29 , H01L24/32 , H01L24/83 , H01L24/94 , H01L25/0657 , H01L25/50 , H01L2224/038 , H01L2224/0384 , H01L2224/04026 , H01L2224/05557 , H01L2224/05647 , H01L2224/0801 , H01L2224/08501 , H01L2224/2745 , H01L2224/27452 , H01L2224/275 , H01L2224/27505 , H01L2224/278 , H01L2224/2784 , H01L2224/29019 , H01L2224/2908 , H01L2224/29111 , H01L2224/29124 , H01L2224/29144 , H01L2224/29147 , H01L2224/29166 , H01L2224/29181 , H01L2224/29184 , H01L2224/29211 , H01L2224/29311 , H01L2224/29347 , H01L2224/3201 , H01L2224/325 , H01L2224/32501 , H01L2224/7565 , H01L2224/83013 , H01L2224/83022 , H01L2224/83191 , H01L2224/83193 , H01L2224/83203 , H01L2224/83345 , H01L2224/83365 , H01L2224/83385 , H01L2224/838 , H01L2224/8383 , H01L2224/8384 , H01L2224/94 , H01L2924/01029 , H01L2924/01327 , H01L2924/1434 , H01L2924/351 , H01L2924/3511 , H01L2924/0105 , H01L2224/83
Abstract: 本发明涉及用于使第一固体衬底(1)与含有第一材料的第二固体衬底(2)粘合的方法,该方法通过下面的步骤,尤其是下面的顺序进行:‑在第二固体衬底(2)上形成或施加含有第二材料的功能层(5),‑使第一固体衬底(1)与第二固体衬底(2)在功能层(5)上接触,‑将固体衬底(1、2)一起压制用于在第一和第二固体衬底(1、2)之间形成永久粘合,该粘合通过第一材料与第二材料的固体扩散和/或相变至少部分地得到增强,其中在功能层(5)上产生体积增加。在粘合过程中,没有或仅仅稍微超出了第一材料对第二材料的溶解度极限,从而尽可能避免金属间相的沉积并与此相反地形成混合晶体。第一材料可以是铜,而第二材料可以是锡。
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公开(公告)号:CN102637610B
公开(公告)日:2014-12-10
申请号:CN201210029734.3
申请日:2012-02-10
Applicant: 英飞凌科技股份有限公司
CPC classification number: H01L24/81 , H01L23/3107 , H01L23/49513 , H01L24/03 , H01L24/05 , H01L24/06 , H01L24/27 , H01L24/29 , H01L24/32 , H01L24/48 , H01L24/73 , H01L24/83 , H01L24/93 , H01L2224/0345 , H01L2224/03452 , H01L2224/04026 , H01L2224/04042 , H01L2224/0508 , H01L2224/05082 , H01L2224/05124 , H01L2224/05139 , H01L2224/05144 , H01L2224/05155 , H01L2224/05164 , H01L2224/05166 , H01L2224/05169 , H01L2224/05171 , H01L2224/05184 , H01L2224/05624 , H01L2224/05639 , H01L2224/05644 , H01L2224/05647 , H01L2224/05655 , H01L2224/05664 , H01L2224/05666 , H01L2224/05669 , H01L2224/05671 , H01L2224/05684 , H01L2224/06181 , H01L2224/27426 , H01L2224/2745 , H01L2224/29018 , H01L2224/29019 , H01L2224/29109 , H01L2224/29111 , H01L2224/29139 , H01L2224/29144 , H01L2224/29147 , H01L2224/32225 , H01L2224/32245 , H01L2224/48091 , H01L2224/48247 , H01L2224/73265 , H01L2224/83191 , H01L2224/83203 , H01L2224/83345 , H01L2224/8381 , H01L2224/83898 , H01L2224/83906 , H01L2224/93 , H01L2924/00014 , H01L2924/01029 , H01L2924/01322 , H01L2924/01327 , H01L2924/12042 , H01L2924/1305 , H01L2924/13055 , H01L2924/1306 , H01L2924/13062 , H01L2924/13091 , H01L2924/1461 , H01L2924/15787 , H01L2924/181 , H01L2924/351 , H01L2924/00012 , H01L2924/3512 , H01L2924/00 , H01L2924/01023 , H01L2924/0105 , H01L2924/01049 , H01L2224/27 , H01L2224/45099 , H01L2224/45015 , H01L2924/207
Abstract: 本发明涉及用于在载体上安装半导体芯片的方法。一种方法包括提供具有第一主表面和沉积在第一主表面上的焊料层的半导体芯片,其中所述焊料层具有至少1μm的粗糙度。将半导体芯片放置在载体上,其中半导体芯片的第一主表面面向所述载体。以第一主表面的每mm2的表面积至少1牛顿的压力将半导体芯片按压在所述载体上,并且对焊料施加热量。
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公开(公告)号:CN102867847B
公开(公告)日:2016-12-21
申请号:CN201210233277.X
申请日:2012-07-05
Applicant: 索尼公司
IPC: H01L29/40 , H01L23/522 , H01L21/28 , H01L21/768 , H01L27/146
CPC classification number: H01L27/14636 , H01L21/76807 , H01L21/7684 , H01L21/76841 , H01L21/76843 , H01L23/481 , H01L23/528 , H01L23/5283 , H01L23/53223 , H01L23/53238 , H01L23/53266 , H01L23/53295 , H01L23/564 , H01L24/03 , H01L24/05 , H01L24/06 , H01L24/08 , H01L24/80 , H01L24/83 , H01L27/0688 , H01L27/14609 , H01L27/14621 , H01L27/14625 , H01L27/1464 , H01L27/14645 , H01L27/1469 , H01L2221/1031 , H01L2224/02245 , H01L2224/05027 , H01L2224/0508 , H01L2224/05124 , H01L2224/05147 , H01L2224/05166 , H01L2224/05181 , H01L2224/05546 , H01L2224/05547 , H01L2224/05571 , H01L2224/05573 , H01L2224/05578 , H01L2224/05647 , H01L2224/05686 , H01L2224/08121 , H01L2224/08145 , H01L2224/0903 , H01L2224/80011 , H01L2224/80013 , H01L2224/80091 , H01L2224/80097 , H01L2224/80203 , H01L2224/80345 , H01L2224/80357 , H01L2224/80895 , H01L2224/80896 , H01L2224/83345 , H01L2924/00014 , H01L2924/12043 , H01L2924/13091 , H04N5/369 , H01L2924/00012 , H01L2924/05442 , H01L2924/05042 , H01L2924/053 , H01L2924/049 , H01L2924/00 , H01L2224/05552
Abstract: 本发明公开了半导体器件、半导体器件制造方法及电子装置。所述半导体器件包括第一基板和第二基板。所述第一基板包括第一电极以及第一绝缘膜,所述第一绝缘膜由针对所述第一电极的防扩散材料构成并覆盖所述第一电极的周边。所述第一电极与所述第一绝缘膜互相配合而构成结合表面。所述第二基板结合至所述第一基板并设置于所述第一基板上,且所述第二基板包括第二电极以及第二绝缘膜,所述第二电极接合至所述第一电极,所述第二绝缘膜由针对所述第二电极的防扩散材料构成并覆盖所述第二电极的周边。所述第二电极与所述第二绝缘膜互相配合而构成与所述第一基板相结合的结合表面。本发明能够确保电极的结合强度,同时能够防止电极材料的扩散。
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公开(公告)号:CN102024717B
公开(公告)日:2012-03-07
申请号:CN201010261581.6
申请日:2010-08-21
Applicant: 比亚迪股份有限公司
CPC classification number: H01L33/40 , H01L24/05 , H01L24/27 , H01L24/29 , H01L24/32 , H01L24/83 , H01L33/0079 , H01L33/641 , H01L2224/04026 , H01L2224/05073 , H01L2224/05138 , H01L2224/05147 , H01L2224/05166 , H01L2224/05639 , H01L2224/05644 , H01L2224/05647 , H01L2224/27472 , H01L2224/27622 , H01L2224/27831 , H01L2224/29011 , H01L2224/2908 , H01L2224/29082 , H01L2224/29101 , H01L2224/29111 , H01L2224/29113 , H01L2224/29116 , H01L2224/29138 , H01L2224/29139 , H01L2224/29144 , H01L2224/29147 , H01L2224/83193 , H01L2224/83203 , H01L2224/83345 , H01L2224/83805 , H01L2924/01322 , H01L2924/12041 , H01L2924/00 , H01L2924/00014 , H01L2224/29018 , H01L2924/00012 , H01L2924/01014 , H01L2924/01048 , H01L2924/01034
Abstract: 一种半导体芯片的共晶方法,包括:以基板的一面为承载面形成第一共晶层和以半导体芯片的一面为承载面形成第二共晶层,所述第一共晶层或者第二共晶层为形成有孔结构的共晶层;对第一共晶层和第二共晶层进行共晶连接。本发明还涉及一种半导体芯片的共晶结构,包括半导体芯片、基板,以及位于半导体芯片和基板之间的共晶连接层,其中,所述共晶连接层由第一连接层和有孔结构的第二连接层共晶结合而成。本发明实施例提供的一种半导体芯片的共晶方法及共晶结构,有孔的共晶层和另一共晶层共晶,使二者之间形成更均匀结合力更强的共晶层,进而提高芯片和基板之间的结合力。
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公开(公告)号:CN102024717A
公开(公告)日:2011-04-20
申请号:CN201010261581.6
申请日:2010-08-21
Applicant: 比亚迪股份有限公司
CPC classification number: H01L33/40 , H01L24/05 , H01L24/27 , H01L24/29 , H01L24/32 , H01L24/83 , H01L33/0079 , H01L33/641 , H01L2224/04026 , H01L2224/05073 , H01L2224/05138 , H01L2224/05147 , H01L2224/05166 , H01L2224/05639 , H01L2224/05644 , H01L2224/05647 , H01L2224/27472 , H01L2224/27622 , H01L2224/27831 , H01L2224/29011 , H01L2224/2908 , H01L2224/29082 , H01L2224/29101 , H01L2224/29111 , H01L2224/29113 , H01L2224/29116 , H01L2224/29138 , H01L2224/29139 , H01L2224/29144 , H01L2224/29147 , H01L2224/83193 , H01L2224/83203 , H01L2224/83345 , H01L2224/83805 , H01L2924/01322 , H01L2924/12041 , H01L2924/00 , H01L2924/00014 , H01L2224/29018 , H01L2924/00012 , H01L2924/01014 , H01L2924/01048 , H01L2924/01034
Abstract: 一种半导体芯片的共晶方法,包括:以基板的一面为承载面形成第一共晶层和以半导体芯片的一面为承载面形成第二共晶层,所述第一共晶层或者第二共晶层为形成有孔结构的共晶层;对第一共晶层和第二共晶层进行共晶连接。本发明还涉及一种半导体芯片的共晶结构,包括半导体芯片、基板,以及位于半导体芯片和基板之间的共晶连接层,其中,所述共晶连接层由第一连接层和有孔结构的第二连接层共晶结合而成。本发明实施例提供的一种半导体芯片的共晶方法及共晶结构,有孔的共晶层和另一共晶层共晶,使二者之间形成更均匀结合力更强的共晶层,进而提高芯片和基板之间的结合力。
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公开(公告)号:CN107464796A
公开(公告)日:2017-12-12
申请号:CN201710383381.X
申请日:2017-05-26
Applicant: 三星显示有限公司
IPC: H01L23/488 , H01B5/16
CPC classification number: H01L27/3276 , H01L24/29 , H01L24/32 , H01L51/0096 , H01L2224/13144 , H01L2224/16238 , H01L2224/271 , H01L2224/29005 , H01L2224/29028 , H01L2224/29083 , H01L2224/29084 , H01L2224/2929 , H01L2224/29293 , H01L2224/2939 , H01L2224/29391 , H01L2224/294 , H01L2224/29439 , H01L2224/29444 , H01L2224/29447 , H01L2224/29455 , H01L2224/29499 , H01L2224/32148 , H01L2224/32225 , H01L2224/32238 , H01L2224/743 , H01L2224/81191 , H01L2224/81903 , H01L2224/831 , H01L2224/83192 , H01L2224/83201 , H01L2224/83203 , H01L2224/83345 , H01L2224/83851 , H01L2224/83862 , H01L2224/9211 , H01L2251/5369 , H01L2924/07811 , H01L2924/1426 , H01L2924/00014 , H01L2924/0665 , H01L2924/00012 , H01L2224/81 , H01L2224/83 , H01B5/16 , H01L2224/29291 , H01L2224/29298 , H01L2224/32227
Abstract: 本发明涉及各向异性导电膜及使用各向异性导电膜的显示装置。一种各向异性导电膜,包括:导电层;第一树脂绝缘层,在导电层的第一表面上方;以及第二树脂绝缘层,在导电层的第二表面上方,其中,导电层包括多个导电粒子和将多个导电粒子连接至彼此的纳米纤维,多个导电粒子中的每一个包括具有锥形的多个针状突出部,并且其中,第一树脂绝缘层和第二树脂绝缘层包括相同的材料并且具有不同的厚度。
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公开(公告)号:CN103370783B
公开(公告)日:2016-02-03
申请号:CN201180067645.1
申请日:2011-12-14
Applicant: 德塞拉股份有限公司
CPC classification number: H01L23/562 , B81C1/00269 , B81C1/00357 , H01L21/2007 , H01L21/561 , H01L21/563 , H01L21/568 , H01L23/13 , H01L24/05 , H01L24/29 , H01L24/32 , H01L24/83 , H01L24/94 , H01L24/97 , H01L25/0655 , H01L25/0657 , H01L25/50 , H01L29/0657 , H01L2224/29186 , H01L2224/2919 , H01L2224/32057 , H01L2224/32145 , H01L2224/32225 , H01L2224/83051 , H01L2224/83191 , H01L2224/83345 , H01L2224/83385 , H01L2224/83855 , H01L2224/83856 , H01L2224/94 , H01L2224/97 , H01L2225/06513 , H01L2225/06517 , H01L2225/06555 , H01L2225/06575 , H01L2924/01005 , H01L2924/01006 , H01L2924/01013 , H01L2924/01023 , H01L2924/01033 , H01L2924/014 , H01L2924/0665 , H01L2924/10158 , H01L2924/10253 , H01L2924/1027 , H01L2924/1032 , H01L2924/1037 , H01L2924/14 , H01L2924/1461 , H01L2924/3511 , H01L2224/83 , H01L2924/00
Abstract: 使第一微电子元件与第二微电子元件结合的方法包括,使其内包含有源电路元件(108)的第一基板(100)与第二基板(112)挤压在一起,可流动介电材料(102)设置在各基板的相面对表面之间,第一基板(100)和第二基板(112)中每个都具有小于每摄氏度百万分之十的热膨胀系数,相面对表面中至少一个具有从此表面的边缘延伸的复数个通道(118A-118F),使得相面对表面所限定的平面之间的介电材料(102)基本上无空穴且具有超过1微米的厚度,且至少一些介电材料(102)流入至少一些通道内。
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公开(公告)号:CN103370783A
公开(公告)日:2013-10-23
申请号:CN201180067645.1
申请日:2011-12-14
Applicant: 德塞拉股份有限公司
CPC classification number: H01L23/562 , B81C1/00269 , B81C1/00357 , H01L21/2007 , H01L21/561 , H01L21/563 , H01L21/568 , H01L23/13 , H01L24/05 , H01L24/29 , H01L24/32 , H01L24/83 , H01L24/94 , H01L24/97 , H01L25/0655 , H01L25/0657 , H01L25/50 , H01L29/0657 , H01L2224/29186 , H01L2224/2919 , H01L2224/32057 , H01L2224/32145 , H01L2224/32225 , H01L2224/83051 , H01L2224/83191 , H01L2224/83345 , H01L2224/83385 , H01L2224/83855 , H01L2224/83856 , H01L2224/94 , H01L2224/97 , H01L2225/06513 , H01L2225/06517 , H01L2225/06555 , H01L2225/06575 , H01L2924/01005 , H01L2924/01006 , H01L2924/01013 , H01L2924/01023 , H01L2924/01033 , H01L2924/014 , H01L2924/0665 , H01L2924/10158 , H01L2924/10253 , H01L2924/1027 , H01L2924/1032 , H01L2924/1037 , H01L2924/14 , H01L2924/1461 , H01L2924/3511 , H01L2224/83 , H01L2924/00
Abstract: 使第一微电子元件与第二微电子元件结合的方法包括,使其内包含有源电路元件(108)的第一基板(100)与第二基板(112)挤压在一起,可流动介电材料(102)设置在各基板的相面对表面之间,第一基板(100)和第二基板(112)中每个都具有小于每摄氏度百万分之十的热膨胀系数,相面对表面中至少一个具有从此表面的边缘延伸的复数个通道(118A-118F),使得相面对表面所限定的平面之间的介电材料(102)基本上无空穴且具有超过1微米的厚度,且至少一些介电材料(102)流入至少一些通道内。
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