-
公开(公告)号:CN107799491A
公开(公告)日:2018-03-13
申请号:CN201710766922.7
申请日:2017-08-31
Applicant: 半导体元件工业有限责任公司
Inventor: 林育圣
IPC: H01L23/485 , H01L21/66
CPC classification number: H01L24/05 , H01L21/02035 , H01L21/26513 , H01L21/304 , H01L21/324 , H01L24/03 , H01L24/45 , H01L2224/0218 , H01L2224/0219 , H01L2224/02205 , H01L2224/02215 , H01L2224/03462 , H01L2224/0362 , H01L2224/04042 , H01L2224/05124 , H01L2224/05147 , H01L2224/05184 , H01L2224/05582 , H01L2224/05647 , H01L2224/0603 , H01L2224/45015 , H01L2224/45147 , H01L2924/01028 , H01L2924/01046 , H01L2924/01047 , H01L2924/01079 , H01L2924/07025 , H01L2924/1203 , H01L2924/13055 , H01L2924/2076 , H01L2924/00014 , H01L23/485 , H01L24/26 , H01L24/27 , H01L24/31 , H01L2224/05247
Abstract: 本发明涉及半导体铜金属化结构。半导体封装的实现方式可以包括:包括焊盘的硅管芯,焊盘包括铝和铜;硅管芯的至少一部分上的钝化层,以及耦合到钝化层的聚酰亚胺(PI)、聚苯并恶唑(PBO)或者聚合树脂中的一种的层。封装可以包括耦合在焊盘上的第一铜层,第一铜层为1微米至20微米厚;耦合在第一铜层上的第二铜层,第二铜层可以为5微米至40微米厚;其中焊盘上第一铜层的宽度可以比焊盘上第二铜层的宽度宽。第一铜层和第二铜层可以被配置为与粗铜丝线键合或者与铜夹焊料接合。
-
公开(公告)号:CN104576599B
公开(公告)日:2017-11-10
申请号:CN201410454274.8
申请日:2014-09-09
Applicant: 联发科技股份有限公司
IPC: H01L23/522
CPC classification number: H01L28/10 , H01L23/5227 , H01L23/53238 , H01L23/66 , H01L24/03 , H01L24/05 , H01L24/08 , H01L24/11 , H01L24/13 , H01L24/45 , H01L24/48 , H01L2223/6677 , H01L2224/02181 , H01L2224/0345 , H01L2224/03912 , H01L2224/03914 , H01L2224/0401 , H01L2224/04042 , H01L2224/05009 , H01L2224/05022 , H01L2224/05124 , H01L2224/05166 , H01L2224/05181 , H01L2224/05186 , H01L2224/05572 , H01L2224/05582 , H01L2224/05624 , H01L2224/05639 , H01L2224/05644 , H01L2224/05647 , H01L2224/08123 , H01L2224/08265 , H01L2224/11019 , H01L2224/1134 , H01L2224/11462 , H01L2224/1147 , H01L2224/11849 , H01L2224/13022 , H01L2224/1308 , H01L2224/13083 , H01L2224/131 , H01L2224/13147 , H01L2224/4502 , H01L2224/45144 , H01L2224/45147 , H01L2224/48463 , H01L2224/48824 , H01L2224/48839 , H01L2224/48844 , H01L2224/48847 , H01L2224/85007 , H01L2924/19011 , H01L2924/19042 , H01L2924/19051 , H01L2924/19103 , H01L2924/19104 , H01L2924/00014 , H01L2924/00 , H01L2924/04941 , H01L2924/04953 , H01L2924/014
Abstract: 本发明公开一种半导体结构。半导体结构包括:基底;第一钝化层,设置于所述基底上;导电垫,设置于所述第一钝化层上;第二钝化层,设置于所述第一钝化层上;被动元件,设置于所述导电垫上,并穿过所述第二钝化层;以及有机可焊性保护膜,覆盖所述被动元件。本发明所公开的半导体结构,有机可焊性保护膜可以防止表面效应的发生,此外,能够减小电阻并具有较高的品质因数。
-
公开(公告)号:CN103972115B
公开(公告)日:2017-03-01
申请号:CN201310594257.X
申请日:2013-11-21
Applicant: 富士通株式会社
IPC: H01L21/60 , H01L23/488 , B23K1/00 , B23K35/26
CPC classification number: H01L24/13 , B23K35/004 , B23K35/007 , B23K35/0244 , B23K35/24 , B23K35/262 , B23K35/264 , B23K2101/40 , H01L21/76843 , H01L23/49811 , H01L23/49866 , H01L24/03 , H01L24/05 , H01L24/16 , H01L24/81 , H01L2224/03462 , H01L2224/03464 , H01L2224/0401 , H01L2224/05082 , H01L2224/05083 , H01L2224/05147 , H01L2224/05155 , H01L2224/05164 , H01L2224/05582 , H01L2224/05644 , H01L2224/05647 , H01L2224/05655 , H01L2224/13111 , H01L2224/13113 , H01L2224/16225 , H01L2224/16227 , H01L2224/16501 , H01L2224/73204 , H01L2224/81075 , H01L2224/81211 , H01L2224/81815 , H01L2924/0103 , H01L2924/01322 , H01L2924/014 , H01L2924/15311 , H05K3/244 , H05K3/3436 , H05K3/3463 , H05K3/3494 , H05K2201/10734 , H01L2924/00014 , H01L2924/01083 , H01L2924/0105 , H01L2924/01015 , H01L2924/01047 , H01L2924/01051 , H01L2924/01027 , H01L2924/01028 , H01L2924/01024 , H01L2924/01032 , H01L2924/00
Abstract: 本发明涉及半导体器件以及制造半导体器件的方法。一种制造半导体器件的方法,包括:在布线板的第一电极和半导体元件的第二电极中的至少一者的表面上形成阻挡金属膜;在第一电极与第二电极之间设置连接端子,连接端子由含锡、铋和锌的钎料制成;以及通过加热连接端子并且将连接端子的温度保持在不低于钎料熔点的恒定温度下一定时间段,来将连接端子接合至阻挡金属膜。
-
公开(公告)号:CN103035600B
公开(公告)日:2016-05-04
申请号:CN201210285329.8
申请日:2012-08-10
Applicant: 台湾积体电路制造股份有限公司
IPC: H01L23/488 , H01L23/29
CPC classification number: H01L23/293 , H01L23/3192 , H01L24/01 , H01L24/03 , H01L24/05 , H01L24/11 , H01L24/13 , H01L2224/0345 , H01L2224/03452 , H01L2224/0346 , H01L2224/03912 , H01L2224/0401 , H01L2224/05008 , H01L2224/05022 , H01L2224/05124 , H01L2224/05147 , H01L2224/05155 , H01L2224/05571 , H01L2224/05573 , H01L2224/05582 , H01L2224/05647 , H01L2224/05666 , H01L2224/05681 , H01L2224/05686 , H01L2224/10126 , H01L2224/11334 , H01L2224/1146 , H01L2224/1147 , H01L2224/11849 , H01L2224/13006 , H01L2224/13007 , H01L2224/13018 , H01L2224/13022 , H01L2224/13082 , H01L2224/13111 , H01L2224/13113 , H01L2224/13116 , H01L2224/13139 , H01L2224/13147 , H01L2224/13155 , H01L2924/00014 , H01L2924/01029 , H01L2924/10253 , H01L2924/15788 , H01L2924/014 , H01L2924/00012 , H01L2924/04941 , H01L2924/01047 , H01L2924/01024 , H01L2924/01028 , H01L2924/0105 , H01L2924/01079 , H01L2924/00 , H01L2224/05552
Abstract: 本发明涉及一种半导体器件,该半导体器件包括形成在后钝化互连(PPI)线上并且被保护结构所包围的凸块结构。该保护结构包括聚合物层和至少一个介电层。介电层可形成为在聚合物层的顶面上,聚合物层的下方,插入到凸块结构和聚合物层之间,插入到PPI线和聚合物层之间,覆盖聚合物层的外侧壁或它们的组合。本发明还涉及具有保护结构的凸块。
-
公开(公告)号:CN105280598A
公开(公告)日:2016-01-27
申请号:CN201410364624.1
申请日:2014-07-29
Applicant: 矽品精密工业股份有限公司
IPC: H01L23/488 , H01L21/60
CPC classification number: H01L25/162 , H01L23/3128 , H01L23/3157 , H01L23/42 , H01L23/49816 , H01L23/49833 , H01L23/562 , H01L23/564 , H01L24/05 , H01L24/06 , H01L24/11 , H01L24/13 , H01L24/14 , H01L24/16 , H01L24/17 , H01L24/29 , H01L24/32 , H01L24/81 , H01L24/83 , H01L25/0657 , H01L25/105 , H01L25/50 , H01L2224/0401 , H01L2224/05015 , H01L2224/05016 , H01L2224/05078 , H01L2224/0519 , H01L2224/05561 , H01L2224/05582 , H01L2224/056 , H01L2224/05611 , H01L2224/06132 , H01L2224/06181 , H01L2224/11825 , H01L2224/12105 , H01L2224/13014 , H01L2224/13017 , H01L2224/13023 , H01L2224/13078 , H01L2224/13082 , H01L2224/13083 , H01L2224/13111 , H01L2224/13144 , H01L2224/13147 , H01L2224/1319 , H01L2224/13582 , H01L2224/13671 , H01L2224/1369 , H01L2224/1401 , H01L2224/141 , H01L2224/16145 , H01L2224/16147 , H01L2224/16227 , H01L2224/16237 , H01L2224/1703 , H01L2224/17051 , H01L2224/17181 , H01L2224/17517 , H01L2224/17519 , H01L2224/291 , H01L2224/2929 , H01L2224/293 , H01L2224/32145 , H01L2224/32225 , H01L2224/73204 , H01L2224/73253 , H01L2224/81191 , H01L2224/81192 , H01L2224/81193 , H01L2224/81815 , H01L2224/83101 , H01L2224/83801 , H01L2224/8385 , H01L2225/06513 , H01L2225/06548 , H01L2225/06568 , H01L2225/1023 , H01L2225/1058 , H01L2225/1082 , H01L2924/0635 , H01L2924/15311 , H01L2924/15321 , H01L2924/15331 , H01L2924/18161 , H01L2924/381 , H01L2924/3841 , H01L2924/00012 , H01L2924/00014 , H01L2924/01082 , H01L2924/01047 , H01L2924/01029 , H01L2924/07025 , H01L2924/00
Abstract: 一种半导体封装件及其制法,该半导体封装件包括:第一半导体装置,其具有相对的第一顶面与第一底面;多个导通球,其形成于该第一顶面;第二半导体装置,其具有相对的第二顶面与第二底面,且该第二底面为面向该第一顶面;以及多个导电柱,其形成于该第二底面,并分别接合该些导通球以电性连接该第一及第二半导体装置,且该导电柱的高度小于300微米。藉此,本发明可易于控制该半导体封装件的高度,并用于具有更精细间距的导通球的半导体封装件上。
-
公开(公告)号:CN105140139A
公开(公告)日:2015-12-09
申请号:CN201510411275.9
申请日:2015-05-29
Applicant: 英飞凌科技股份有限公司
IPC: H01L21/60
CPC classification number: H01L24/03 , H01L21/6835 , H01L21/6836 , H01L21/82 , H01L24/05 , H01L2221/68327 , H01L2221/68336 , H01L2221/6834 , H01L2224/03002 , H01L2224/0312 , H01L2224/0345 , H01L2224/03464 , H01L2224/0347 , H01L2224/0348 , H01L2224/0361 , H01L2224/03614 , H01L2224/0362 , H01L2224/05016 , H01L2224/05022 , H01L2224/05023 , H01L2224/05082 , H01L2224/05084 , H01L2224/05111 , H01L2224/05124 , H01L2224/05562 , H01L2224/05568 , H01L2224/05573 , H01L2224/05582 , H01L2224/05583 , H01L2224/05611 , H01L2224/05644 , H01L2224/05647 , H01L2224/05664 , H01L2224/05672 , H01L2224/80203 , H01L2224/80825 , H01L2224/94 , H01L2224/97 , H01L2924/01028 , H01L2924/01029 , H01L2924/01042 , H01L2924/01046 , H01L2924/01047 , H01L2924/0105 , H01L2924/01078 , H01L2924/01079 , H01L2924/0132 , H01L2224/03 , H01L2924/00014 , H01L2224/05624 , H01L24/81
Abstract: 本发明涉及厚金属焊盘的处理。在本发明的实施例中,形成半导体器件的方法包括提供包含第一芯片区和第二芯片区的半导体衬底。在所述第一芯片区之上形成第一接触焊盘并在所述第二芯片区之上形成第二接触焊盘。所述第一和第二接触焊盘至少与所述半导体衬底一样厚。该方法进一步包括在所述第一和第二接触焊盘之间切割穿过该半导体衬底。所述切割从包括所述第一接触焊盘和第二接触焊盘的半导体衬底一侧执行。在所述第一和第二接触焊盘以及通过切割暴露的半导体衬底的侧壁之上形成导电衬垫。
-
公开(公告)号:CN105047643A
公开(公告)日:2015-11-11
申请号:CN201510204708.3
申请日:2015-04-27
Applicant: 联咏科技股份有限公司
IPC: H01L23/522
CPC classification number: H01L24/13 , H01L23/3171 , H01L23/525 , H01L23/528 , H01L23/5286 , H01L23/53209 , H01L23/53228 , H01L23/53238 , H01L23/53242 , H01L23/53252 , H01L24/05 , H01L2224/0235 , H01L2224/02375 , H01L2224/02379 , H01L2224/03462 , H01L2224/0401 , H01L2224/05016 , H01L2224/05022 , H01L2224/05124 , H01L2224/05147 , H01L2224/05548 , H01L2224/05582 , H01L2224/05644 , H01L2224/05647 , H01L2224/05655 , H01L2224/05664 , H01L2224/05666 , H01L2224/13005 , H01L2224/13007 , H01L2224/13009 , H01L2224/13016 , H01L2224/13023 , H01L2224/13024 , H01L2224/13028 , H01L2224/13144 , H01L2224/13147 , H01L2224/13155 , H01L2224/13164 , H01L2924/01028 , H01L2924/01029 , H01L2924/01046 , H01L2924/01074 , H01L2924/01079 , H01L2924/0132 , H01L2924/14 , H01L2924/2064 , H01L2924/00014 , H01L2924/2075 , H01L2924/20751
Abstract: 本发明提供一种集成电路,该集成电路包括芯片(chip)、保护层(passivation layer)、第一金属内连线、路由线(routing wire)以及压合区。保护层配置于芯片上,其中该保护层具有第一开孔。第一金属内连线配置于保护层下以及配置于该芯片中。路由线配置于保护层上,其中该路由线的第一端通过保护层的第一开孔电性连接第一金属内连线的第一端。压合区配置于保护层上,其中该压合区电性连接路由线的第二端。本发明提供的集成电路可以降低电性路径的内部阻抗。
-
公开(公告)号:CN104795318A
公开(公告)日:2015-07-22
申请号:CN201510029447.6
申请日:2015-01-21
Applicant: 瑞萨电子株式会社
IPC: H01L21/283
CPC classification number: H01L21/288 , C25D3/48 , C25D5/10 , C25D5/16 , C25D5/18 , C25D7/123 , C25D17/001 , C25D21/10 , H01L24/11 , H01L24/13 , H01L24/742 , H01L2224/0345 , H01L2224/0401 , H01L2224/05022 , H01L2224/05124 , H01L2224/05147 , H01L2224/05166 , H01L2224/05572 , H01L2224/05582 , H01L2224/05664 , H01L2224/11462 , H01L2224/1147 , H01L2224/13022 , H01L2224/13144 , H01L2924/00014
Abstract: 一种半导体器件的制造方法。通过抑制电沉积金电极的表面状态的变化防止有关半导体器件的外观检查的错误报告。在电沉积金电极的形成中,通过交替地重复执行在使电沉积金层的晶体生长的电镀设备的处理杯中提供的阳极电极和阴极电极之间的通电步骤即通电ON,和执行在阳极电极和阴极电极之间的不通电步骤即通电OFF,形成由堆叠的多个电沉积金层形成的电沉积金电极。因此,即使电镀液的成分出现老化变化,也能抑制电沉积金电极的表面状态的变化,并能够保持具有例如约0.25rad的表面粗糙度的表面状态。结果,能够减少由于在电沉积金电极的外观检查中发现的电沉积金电极的亮度变化的半导体器件的外观检查的错误报告。
-
公开(公告)号:CN104253053A
公开(公告)日:2014-12-31
申请号:CN201310422055.7
申请日:2013-09-16
Applicant: 台湾积体电路制造股份有限公司
IPC: H01L21/60 , H01L23/488
CPC classification number: H01L24/02 , H01L21/76802 , H01L23/3171 , H01L23/49811 , H01L23/5226 , H01L24/03 , H01L24/05 , H01L24/11 , H01L24/13 , H01L2224/02125 , H01L2224/02311 , H01L2224/02351 , H01L2224/02375 , H01L2224/02381 , H01L2224/0239 , H01L2224/0346 , H01L2224/03464 , H01L2224/0347 , H01L2224/0362 , H01L2224/03622 , H01L2224/0391 , H01L2224/0401 , H01L2224/05008 , H01L2224/05018 , H01L2224/05082 , H01L2224/05124 , H01L2224/05139 , H01L2224/05144 , H01L2224/05147 , H01L2224/05155 , H01L2224/05184 , H01L2224/05548 , H01L2224/05555 , H01L2224/05558 , H01L2224/05563 , H01L2224/05569 , H01L2224/05572 , H01L2224/05582 , H01L2224/05644 , H01L2224/05647 , H01L2224/05655 , H01L2224/05664 , H01L2224/1132 , H01L2224/11849 , H01L2224/13007 , H01L2224/13022 , H01L2224/13024 , H01L2224/131 , H01L2224/13147 , H01L2224/73204 , H01L2924/01029 , H01L2924/14 , H01L2924/181 , H01L2924/014 , H01L2924/00
Abstract: 本发明提供了一种方法,包括在金属焊盘的一部分上方形成钝化层,在钝化层上方形成聚合物层,以及使用光刻掩模来曝光聚合物层。光刻掩模具有不透明部分、透明部分以及局部透明部分。对经曝光的聚合物层进行显影以形成开口,其中金属焊盘通过开口被暴露。后钝化互连件(PPI)形成在聚合物层上方,其中PPI包括延伸至开口内的部分以与金属焊盘连接。本发明还公开了具有与凹槽对准的焊料区的封装件。
-
公开(公告)号:CN104008981A
公开(公告)日:2014-08-27
申请号:CN201310199231.5
申请日:2013-05-24
Applicant: 台湾积体电路制造股份有限公司
IPC: H01L21/60
CPC classification number: H01L24/11 , H01L24/03 , H01L24/05 , H01L24/13 , H01L2224/03424 , H01L2224/0345 , H01L2224/03462 , H01L2224/03464 , H01L2224/0348 , H01L2224/0391 , H01L2224/0401 , H01L2224/05022 , H01L2224/05026 , H01L2224/05027 , H01L2224/05109 , H01L2224/05111 , H01L2224/05139 , H01L2224/05144 , H01L2224/05155 , H01L2224/05164 , H01L2224/05166 , H01L2224/05572 , H01L2224/05573 , H01L2224/05582 , H01L2224/05583 , H01L2224/05609 , H01L2224/05611 , H01L2224/05624 , H01L2224/05639 , H01L2224/05644 , H01L2224/05647 , H01L2224/05655 , H01L2224/05664 , H01L2224/05666 , H01L2224/05681 , H01L2224/05687 , H01L2224/11334 , H01L2224/13022 , H01L2224/13111 , H01L2224/13113 , H01L2224/13116 , H01L2224/81191 , H01L2224/94 , H01L2224/97 , H01L2924/15788 , H01L2924/00014 , H01L2924/01082 , H01L2924/04941 , H01L2924/04953 , H01L2924/01047 , H01L2224/11 , H01L2224/81 , H01L2924/00012 , H01L2924/00
Abstract: 一种形成凸块结构的方法,包括:通过化学镀工艺在顶部金属层上形成金属化层;在金属化层上方形成聚合物层;在聚合物层上形成开口以暴露金属化层;以及在暴露的金属化层上方形成焊料凸块,以与顶部金属层电接触。
-
-
-
-
-
-
-
-
-