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公开(公告)号：CN101668880A
公开(公告)日：2010-03-10
申请号：CN200880013501.6
申请日：2008-04-23
Applicant: 日立化成工业株式会社
CPC classification number: C23C18/1651 , C23C18/1837 , C23C18/42 , C23C18/54 , H01L21/4846 , H01L21/561 , H01L23/3128 , H01L23/498 , H01L23/49816 , H01L23/49822 , H01L23/49838 , H01L23/544 , H01L24/16 , H01L24/32 , H01L24/45 , H01L24/48 , H01L24/49 , H01L24/73 , H01L24/81 , H01L24/97 , H01L2223/54426 , H01L2223/5446 , H01L2224/13099 , H01L2224/13111 , H01L2224/16225 , H01L2224/29111 , H01L2224/2919 , H01L2224/32057 , H01L2224/32225 , H01L2224/45015 , H01L2224/45144 , H01L2224/48091 , H01L2224/48227 , H01L2224/49 , H01L2224/73204 , H01L2224/73265 , H01L2224/81121 , H01L2224/81801 , H01L2224/83385 , H01L2224/97 , H01L2924/00011 , H01L2924/00014 , H01L2924/01005 , H01L2924/01006 , H01L2924/01007 , H01L2924/01011 , H01L2924/01013 , H01L2924/01014 , H01L2924/01015 , H01L2924/01016 , H01L2924/01018 , H01L2924/01019 , H01L2924/01022 , H01L2924/01023 , H01L2924/01024 , H01L2924/01027 , H01L2924/01028 , H01L2924/01029 , H01L2924/0103 , H01L2924/01031 , H01L2924/01032 , H01L2924/01033 , H01L2924/0104 , H01L2924/01041 , H01L2924/01042 , H01L2924/01044 , H01L2924/01045 , H01L2924/01046 , H01L2924/01047 , H01L2924/01049 , H01L2924/0105 , H01L2924/01057 , H01L2924/01061 , H01L2924/01073 , H01L2924/01074 , H01L2924/01078 , H01L2924/01079 , H01L2924/01082 , H01L2924/01083 , H01L2924/01088 , H01L2924/0132 , H01L2924/01322 , H01L2924/0133 , H01L2924/014 , H01L2924/09701 , H01L2924/10329 , H01L2924/12044 , H01L2924/15311 , H01L2924/15787 , H01L2924/15788 , H01L2924/1579 , H01L2924/181 , H01L2924/351 , H05K3/244 , H05K2203/072 , H05K2203/073 , H01L2924/00 , H01L2924/3512 , H01L2924/00012 , H01L2924/20752 , H01L2924/00015 , H01L2224/05599 , H01L2224/0401
Abstract: 本发明改善具有置换镀金膜的连接端子的连接可靠性。一种连接端子，具有：导体层；非电解镀镍膜；第一镀钯膜，其是纯度为99质量％以上的置换镀钯膜或非电解镀钯膜；第二镀钯膜，其是纯度为90质量％以上且小于99质量％的非电解镀钯膜；置换镀金膜，其中，非电解镀镍膜、第一镀钯膜、第二镀钯膜及置换镀金膜依次层叠在导体层的一面侧，置换镀金膜位于与导体层相反侧的最表层。
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公开(公告)号：CN101668880B
公开(公告)日：2011-03-09
申请号：CN200880013501.6
申请日：2008-04-23
Applicant: 日立化成工业株式会社
CPC classification number: C23C18/1651 , C23C18/1837 , C23C18/42 , C23C18/54 , H01L21/4846 , H01L21/561 , H01L23/3128 , H01L23/498 , H01L23/49816 , H01L23/49822 , H01L23/49838 , H01L23/544 , H01L24/16 , H01L24/32 , H01L24/45 , H01L24/48 , H01L24/49 , H01L24/73 , H01L24/81 , H01L24/97 , H01L2223/54426 , H01L2223/5446 , H01L2224/13099 , H01L2224/13111 , H01L2224/16225 , H01L2224/29111 , H01L2224/2919 , H01L2224/32057 , H01L2224/32225 , H01L2224/45015 , H01L2224/45144 , H01L2224/48091 , H01L2224/48227 , H01L2224/49 , H01L2224/73204 , H01L2224/73265 , H01L2224/81121 , H01L2224/81801 , H01L2224/83385 , H01L2224/97 , H01L2924/00011 , H01L2924/00014 , H01L2924/01005 , H01L2924/01006 , H01L2924/01007 , H01L2924/01011 , H01L2924/01013 , H01L2924/01014 , H01L2924/01015 , H01L2924/01016 , H01L2924/01018 , H01L2924/01019 , H01L2924/01022 , H01L2924/01023 , H01L2924/01024 , H01L2924/01027 , H01L2924/01028 , H01L2924/01029 , H01L2924/0103 , H01L2924/01031 , H01L2924/01032 , H01L2924/01033 , H01L2924/0104 , H01L2924/01041 , H01L2924/01042 , H01L2924/01044 , H01L2924/01045 , H01L2924/01046 , H01L2924/01047 , H01L2924/01049 , H01L2924/0105 , H01L2924/01057 , H01L2924/01061 , H01L2924/01073 , H01L2924/01074 , H01L2924/01078 , H01L2924/01079 , H01L2924/01082 , H01L2924/01083 , H01L2924/01088 , H01L2924/0132 , H01L2924/01322 , H01L2924/0133 , H01L2924/014 , H01L2924/09701 , H01L2924/10329 , H01L2924/12044 , H01L2924/15311 , H01L2924/15787 , H01L2924/15788 , H01L2924/1579 , H01L2924/181 , H01L2924/351 , H05K3/244 , H05K2203/072 , H05K2203/073 , H01L2924/00 , H01L2924/3512 , H01L2924/00012 , H01L2924/20752 , H01L2924/00015 , H01L2224/05599 , H01L2224/0401
Abstract: 本发明改善具有置换镀金膜的连接端子的连接可靠性。一种连接端子，具有：导体层；非电解镀镍膜；第一镀钯膜，其是纯度为99质量％以上的置换镀钯膜或非电解镀钯膜；第二镀钯膜，其是纯度为90质量％以上且小于99质量％的非电解镀钯膜；置换镀金膜，其中，非电解镀镍膜、第一镀钯膜、第二镀钯膜及置换镀金膜依次层叠在导体层的一面侧，置换镀金膜位于与导体层相反侧的最表层。
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