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公开(公告)号:CN102917835B
公开(公告)日:2015-07-01
申请号:CN201180025835.7
申请日:2011-07-28
Applicant: 日立金属株式会社
IPC: B23K35/22 , B23K1/00 , B23K35/14 , B23K35/26 , B23K35/28 , B23K35/30 , B23K35/40 , C22C5/02 , C22C5/06 , C22C9/00 , C22C13/00 , C22C18/00 , C22C18/02 , C22C21/00 , H01L21/52 , H05K3/34 , B23K101/40
CPC classification number: B23K35/0238 , B21B3/00 , B23K1/0016 , B23K35/282 , B23K35/286 , B23K35/302 , B23K35/38 , B23K35/383 , B23K2101/40 , B32B15/017 , B32B15/018 , C22C5/02 , C22C9/00 , C22F1/00 , C22F1/04 , C22F1/08 , C22F1/165 , H01L21/50 , H01L23/06 , H01L23/10 , H01L23/3107 , H01L23/3735 , H01L23/49513 , H01L23/49582 , H01L24/27 , H01L24/29 , H01L24/32 , H01L24/48 , H01L24/73 , H01L24/743 , H01L24/83 , H01L2224/2784 , H01L2224/29101 , H01L2224/32225 , H01L2224/32245 , H01L2224/48091 , H01L2224/48137 , H01L2224/48227 , H01L2224/48247 , H01L2224/48472 , H01L2224/73265 , H01L2224/83101 , H01L2224/838 , H01L2224/8382 , H01L2924/00011 , H01L2924/00014 , H01L2924/01004 , H01L2924/01005 , H01L2924/01006 , H01L2924/01012 , H01L2924/01013 , H01L2924/01019 , H01L2924/01025 , H01L2924/01029 , H01L2924/0103 , H01L2924/01032 , H01L2924/01033 , H01L2924/01046 , H01L2924/01047 , H01L2924/0105 , H01L2924/01074 , H01L2924/01075 , H01L2924/01078 , H01L2924/01079 , H01L2924/01082 , H01L2924/013 , H01L2924/0132 , H01L2924/01322 , H01L2924/01327 , H01L2924/014 , H01L2924/10329 , H01L2924/12041 , H01L2924/12042 , H01L2924/13055 , H01L2924/13091 , H01L2924/15787 , H01L2924/16152 , H01L2924/181 , Y10T428/12708 , Y10T428/12736 , Y10T428/12792 , H01L2924/00 , H01L2924/3512 , H01L2924/00012 , H01L2224/45099 , H01L2224/83205
Abstract: 本发明的目的在于,对于半导体元件与框架或基板的接合、或者金属板与金属板的接合,使用不使用铅的材料并且确保高可靠性。作为半导体元件与框架或基板的接合材料,通过使用Zn系金属层101由Al系金属层102a、102b夹持,并且Al系金属层102a、102b的外侧由X系金属层103a、103b(X=Cu、Au、Ag、Sn)夹持的层压材料作为接合材料,即使在高氧气浓度氛围中,表面的X系金属层也会在该接合材料熔融的时刻之前保护Zn和Al免遭氧化,可以保持该接合材料作为焊料的润湿性、接合性,可以确保接合部的高可靠性。