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公开(公告)号:CN101771013A
公开(公告)日:2010-07-07
申请号:CN200910262202.2
申请日:2009-12-22
IPC: H01L23/482 , H01L21/60
CPC classification number: H01L23/53238 , H01L24/03 , H01L24/05 , H01L24/45 , H01L24/48 , H01L24/85 , H01L2224/04042 , H01L2224/05083 , H01L2224/05124 , H01L2224/05147 , H01L2224/05166 , H01L2224/05556 , H01L2224/05644 , H01L2224/05655 , H01L2224/05664 , H01L2224/45144 , H01L2224/45147 , H01L2224/48463 , H01L2224/48644 , H01L2224/48655 , H01L2224/48664 , H01L2224/48844 , H01L2224/48855 , H01L2224/48864 , H01L2224/85 , H01L2224/85205 , H01L2924/00011 , H01L2924/00015 , H01L2924/01005 , H01L2924/01013 , H01L2924/01014 , H01L2924/01022 , H01L2924/01028 , H01L2924/01029 , H01L2924/01033 , H01L2924/01046 , H01L2924/01078 , H01L2924/01079 , H01L2924/01082 , H01L2924/01322 , H01L2924/05042 , H01L2924/10253 , H01L2924/13091 , H01L2924/00014 , H01L2924/00 , H01L2924/01006
Abstract: 一种半导体装置,其在铜配线上把铜引线进行引线接合而构成,抑制配线脱落和在铜引线下的绝缘膜出现裂纹的不好情况。本发明的半导体装置具备:在半导体基板(1)上形成的铜配线(8)、把所述铜配线(8)的表面和侧面覆盖地形成的镀敷层(10)、经由所述镀敷层(10)在所述铜配线(8)上进行引线接合的铜引线(22)。