公开(公告)号：US09871470B2

公开(公告)日：2018-01-16

申请号：US15431249

申请日：2017-02-13

Applicant: SII Crystal Technology Inc.

Inventor： Naoya Ichimura

IPC: H03H9/21 ,  H02N2/00 ,  B06B1/06 ,  H01L41/09 ,  H01L41/187

CPC classification number: H02N2/0015 ,  B06B1/0603 ,  H01L41/0933 ,  H01L41/187

Abstract: The piezoelectric vibrator element is miniaturized, and at the same time, the vibration leakage is suppressed. The piezoelectric vibrator element is formed so that the total length L1 of the piezoelectric vibrator element, the length L2 of the base, the width L3 of the connection part, the length L4 of the support arm part fulfill all of the following conditions A through C, Condition A: 0.1≦L2/L1≦0.2, Condition B: 0.4≦L3/L2≦0.6, Condition C: L4/L1≧0.7. While the miniaturization is realized by shortening the base due to the condition A, the distance via the base can be elongated due to the condition B. Further, by increasing the length of the support arm parts due to the condition C, it is possible to increase the total mass of the path transmitting the vibration to absorb the vibration to thereby further suppress the vibration leakage.

公开(公告)号：US10249813B2

公开(公告)日：2019-04-02

申请号：US15341587

申请日：2016-11-02

Applicant: SII Crystal Technology Inc.

Inventor： Naoya Ichimura

IPC: H04R17/00 ,  H01L41/27 ,  H01L41/293 ,  H01L41/297 ,  H03H3/02 ,  H03H9/10 ,  H03H9/21 ,  H01L41/332

Abstract: There is provided a method of manufacturing a piezoelectric vibrator element capable of preventing the piezoelectric vibrator element from being damaged when segmentallizing the piezoelectric vibrator element. The method of manufacturing a piezoelectric vibrator element includes the steps of providing the wafer with the piezoelectric plate and a frame part adapted to support the piezoelectric plate via a connection part, providing a pair of excitation electrodes to the piezoelectric plate, and forming a pair of extending electrodes extending from the piezoelectric plate to the frame part through the connection part and electrically connected respectively to the pair of excitation electrodes, and segmentallizing the piezoelectric plate by cutting the connection part. In the step of providing the pair of excitation electrodes, the pair of extending electrodes are formed on a side surface of the connection part.

公开(公告)号：US10608558B2

公开(公告)日：2020-03-31

申请号：US15704539

申请日：2017-09-14

Applicant: SII Crystal Technology Inc.

Inventor： Naoya Ichimura

IPC: H02N2/00 ,  H03H9/215 ,  H03H9/10 ,  H01L41/053 ,  H01L41/09 ,  H01L41/253 ,  H01L41/29 ,  H01L41/338 ,  H03H3/04 ,  H03H9/13

Abstract: There is provided a wafer making it possible to stably break off the piezoelectric vibrator element. The wafer includes a piezoelectric vibrator element, a frame part, and a connection part adapted to connect the piezoelectric vibrator element and the frame part to each other, and the connection part is provided with a guide part adapted to guide force, which is applied to the connection part from one surface side in the thickness direction of the connection part when breaking off the piezoelectric vibrator element from the frame part at the connection part, to at least one side in the width direction of the connection part.

公开(公告)号：US09871469B2

公开(公告)日：2018-01-16

申请号：US15431209

申请日：2017-02-13

Applicant: SII Crystal Technology Inc.

Inventor： Naoya Ichimura

IPC: H03H9/21 ,  H02N2/00 ,  B06B1/06 ,  H01L41/09 ,  H01L41/187

CPC classification number: H02N2/0015 ,  B06B1/0603 ,  H01L41/0933 ,  H01L41/187

Abstract: A piezoelectric vibrator element includes a pair of vibrating arms extending from a base, and having a groove on each of opposing principal surfaces in the longitudinal direction of the vibrating arms. Two systems of excitation electrodes are included on the side surfaces and the opposing principal surfaces, and in the grooves of the vibrating arms. A width of a bank part formed by a side surface of the vibrating arms and a side surface of the groves is W0, and the separation distance between the excitation electrodes on the opposing principal surfaces is W1, such that 1 μm W1.

公开(公告)号：US09590588B2

公开(公告)日：2017-03-07

申请号：US15041558

申请日：2016-02-11

Applicant: SII Crystal Technology Inc.

Inventor： Takashi Kobayashi ,  Naoya Ichimura

IPC: H03H9/21 ,  H03H9/10 ,  G04C3/12

CPC classification number: H03H9/21 ,  G04C3/12 ,  H03H9/1014

Abstract: A pair of vibrating arm portions are disposed lined up in a second direction perpendicular to a first direction and are configured such that base end sides thereof in the first direction are fixed to a base portion. A pair of inclined surfaces are formed on both sides in the second direction on the base end side of the vibrating arm portion so that a width of the vibrating arm portion in the second direction is gradually widened from the distal end side to the base end side. A length of a region, having the pair of inclined surfaces formed therein, in the first direction is set to equal to or greater than 0.25 times and equal to or less than 0.5 times of a total length of the vibrating arm portion from the base end to the distal end.

Abstract translation: 一对振动臂部在与第一方向垂直的第二方向上排列成排列，并且构造成使得其在第一方向上的基端侧固定到基部。 在振动臂部的基端侧的第二方向的两侧形成有一对倾斜面，使得振动臂部在第二方向上的宽度从前端侧向基端侧逐渐变宽 。 在第一方向上形成有一对倾斜面的区域的长度被设定为等于或大于振动臂部从基端的总长度的0.25倍和等于或小于0.5倍的长度 到远端。

公开(公告)号：US09584094B2

公开(公告)日：2017-02-28

申请号：US15002670

申请日：2016-01-21

Applicant: SII Crystal Technology Inc.

Inventor： Naoya Ichimura

IPC: H03H9/21 ,  H01L41/053 ,  H03H9/10

CPC classification number: H03H9/21 ,  H01L41/053 ,  H03H9/1014

Abstract: A pair of vibrating arms are arranged side by side in a second direction crossing the first direction, base end sides of which in the first direction are fixed to the base, a pair of inclined surfaces are formed in both sides of the base end of the vibrating arm in the second direction, an end portion in the base end side of an inner inclined surface is connected to an end surface in the tip end side of the base, and an end portion in the base end side of an outer inclined surface is connected to an end surface of the base in the second direction, and the base-end side end portion of the outer inclined surface is arranged closer to the tip end side than the base-end side end portion of the inner inclined surface.

Abstract translation: 一对振动臂在与第一方向交叉的第二方向上并排布置，其第一方向的基端侧固定在基座上，在基端的两端形成一对倾斜面 振动臂在第二方向上，内倾斜面的基端侧的端部与基座的前端侧的端面连接，外倾斜面的基端侧的端部为 在所述第二方向上与所述基座的端面连接，所述外侧倾斜面的基端侧端部配置成比所述内侧倾斜面的基端侧端部更靠近前端侧。