公开(公告)号：US10249813B2

公开(公告)日：2019-04-02

申请号：US15341587

申请日：2016-11-02

Applicant: SII Crystal Technology Inc.

Inventor： Naoya Ichimura

IPC: H04R17/00 ,  H01L41/27 ,  H01L41/293 ,  H01L41/297 ,  H03H3/02 ,  H03H9/10 ,  H03H9/21 ,  H01L41/332

Abstract: There is provided a method of manufacturing a piezoelectric vibrator element capable of preventing the piezoelectric vibrator element from being damaged when segmentallizing the piezoelectric vibrator element. The method of manufacturing a piezoelectric vibrator element includes the steps of providing the wafer with the piezoelectric plate and a frame part adapted to support the piezoelectric plate via a connection part, providing a pair of excitation electrodes to the piezoelectric plate, and forming a pair of extending electrodes extending from the piezoelectric plate to the frame part through the connection part and electrically connected respectively to the pair of excitation electrodes, and segmentallizing the piezoelectric plate by cutting the connection part. In the step of providing the pair of excitation electrodes, the pair of extending electrodes are formed on a side surface of the connection part.

公开(公告)号：US20180091066A1

公开(公告)日：2018-03-29

申请号：US15704539

申请日：2017-09-14

Applicant: SII Crystal Technology Inc.

Inventor： Naoya ICHIMURA

IPC: H02N2/00 ,  H03H9/13 ,  H03H3/04 ,  H01L41/09 ,  H01L41/053 ,  H01L41/29 ,  H01L41/253 ,  H01L41/338

CPC classification number: H02N2/005 ,  H01L41/053 ,  H01L41/0986 ,  H01L41/253 ,  H01L41/29 ,  H01L41/338 ,  H02N2/002 ,  H02N2/0075 ,  H02N2/22 ,  H03H3/04 ,  H03H9/1014 ,  H03H9/13 ,  H03H9/215 ,  H03H2003/0492

Abstract: There is provided a wafer making it possible to stably break off the piezoelectric vibrator element. The wafer includes a piezoelectric vibrator element, a frame part, and a connection part adapted to connect the piezoelectric vibrator element and the frame part to each other, and the connection part is provided with a guide part adapted to guide force, which is applied to the connection part from one surface side in the thickness direction of the connection part when breaking off the piezoelectric vibrator element from the frame part at the connection part, to at least one side in the width direction of the connection part.

公开(公告)号：US20170125661A1

公开(公告)日：2017-05-04

申请号：US15341587

申请日：2016-11-02

Applicant: SII Crystal Technology Inc.

Inventor： Naoya ICHIMURA

IPC: H01L41/27 ,  H01L41/297 ,  H01L41/332 ,  H01L41/293

CPC classification number: H01L41/27 ,  H01L41/293 ,  H01L41/297 ,  H01L41/332 ,  H03H3/02 ,  H03H9/1014 ,  H03H9/21 ,  H03H2003/026

Abstract: There is provided a method of manufacturing a piezoelectric vibrator element capable of preventing the piezoelectric vibrator element from being damaged when segmentallizing the piezoelectric vibrator element. The method of manufacturing a piezoelectric vibrator element includes the steps of providing the wafer with the piezoelectric plate and a frame part adapted to support the piezoelectric plate via a connection part, providing a pair of excitation electrodes to the piezoelectric plate, and forming a pair of extending electrodes extending from the piezoelectric plate to the frame part through the connection part and electrically connected respectively to the pair of excitation electrodes, and segmentallizing the piezoelectric plate by cutting the connection part. In the step of providing the pair of excitation electrodes, the pair of extending electrodes are formed on a side surface of the connection part.

公开(公告)号：US09509277B2

公开(公告)日：2016-11-29

申请号：US14976893

申请日：2015-12-21

Applicant: SII Crystal Technology Inc.

Inventor： Takashi Kobayashi

IPC: H03H9/21 ,  H03H9/05

CPC classification number: H03H9/21 ,  H03H9/0509

Abstract: A piezoelectric vibrator has a piezoelectric vibrating reed mounted on an upper layer base substrate through a conductive adhesive, in which the piezoelectric vibrating reed includes a first vibrating arm and a second vibrating arm extending along a first direction and arranged side by side in a second direction, a base supporting the first vibrating arm and the second vibrating arm and a first support arm and a second support arm positioned in the outer side of the first vibrating arm and the second vibrating arm in the second direction and bonded to the upper layer base substrate, in which an extrusion amount of the conductive adhesive in the inner side of the first support arm and the second support arm is smaller than an extrusion amount of the conductive adhesive in the outer side of the first support arm and the second support arm.

Abstract translation: 压电振子具有通过导电粘合剂安装在上层基底基板上的压电振动片，其中压电振动片包括沿着第一方向延伸的第一振动臂和第二振动臂，并沿第二方向并排布置 ，支撑所述第一振动臂和所述第二振动臂的基座以及位于所述第一振动臂和所述第二振动臂的外侧的第二支撑臂和第二支撑臂，所述第二支撑臂和所述第二支撑臂接合到所述上层基底基板 其中第一支撑臂和第二支撑臂的内侧中的导电粘合剂的挤出量小于第一支撑臂和第二支撑臂的外侧中的导电粘合剂的挤出量。

公开(公告)号：US20160218694A1

公开(公告)日：2016-07-28

申请号：US15002670

申请日：2016-01-21

Applicant: SII Crystal Technology Inc.

Inventor： Naoya ICHIMURA

IPC: H03H9/21 ,  H01L41/053

CPC classification number: H03H9/21 ,  H01L41/053 ,  H03H9/1014

Abstract: A pair of vibrating arms are arranged side by side in a second direction crossing the first direction, base end sides of which in the first direction are fixed to the base, a pair of inclined surfaces are formed in both sides of the base end of the vibrating arm in the second direction, an end portion in the base end side of an inner inclined surface is connected to an end surface in the tip end side of the base, and an end portion in the base end side of an outer inclined surface is connected to an end surface of the base in the second direction, and the base-end side end portion of the outer inclined surface is arranged closer to the tip end side than the base-end side end portion of the inner inclined surface.

Abstract translation: 一对振动臂在与第一方向交叉的第二方向上并排布置，其第一方向的基端侧固定在基座上，在基端的两端形成一对倾斜面 振动臂在第二方向上，内倾斜面的基端侧的端部与基座的前端侧的端面连接，外倾斜面的基端侧的端部为 在所述第二方向上与所述基座的端面连接，所述外侧倾斜面的基端侧端部配置成比所述内侧倾斜面的基端侧端部更靠近前端侧。

公开(公告)号：US20160094197A1

公开(公告)日：2016-03-31

申请号：US14833499

申请日：2015-08-24

Applicant: SII Crystal Technology Inc.

Inventor： Takashi KOBAYASHI

IPC: H03H9/21 ,  H01L41/053

CPC classification number: H03H9/21 ,  H01L41/053 ,  H03H9/1021

Abstract: A piezoelectric vibration piece includes: a base portion; a pair of vibration arm portions which extends in a first (+Y) direction from the base portion, and is arranged separately in a second (X) direction intersecting with the first (+Y) direction; and a support arm portion which extends in the first (+Y) direction from the base portion. The support arm portion, includes a first arm portion formed such that a width which is a length along the second (X) direction is gradually narrowed towards a tip end portion side of the support arm portion, and a second arm portion which extends in the first (+Y) direction from the first arm portion and is formed such that the width is broadened towards the tip end portion side.

Abstract translation: 压电振动片包括：基部; 一对振动臂部，其从所述基部沿第一（+ Y）方向延伸，并且与所述第一（+ Y）方向交叉的第二（X）方向分开配置; 以及从基部沿第一（+ Y）方向延伸的支撑臂部。 支撑臂部包括第一臂部，其形成为使得沿着第二（X）方向的长度的宽度朝向支撑臂部的前端部侧逐渐变窄，第二臂部在第 第一（+ Y）方向，并且形成为使得宽度朝向前端部侧变宽。

公开(公告)号：US08987978B2

公开(公告)日：2015-03-24

申请号：US14024857

申请日：2013-09-12

Applicant: SII Crystal Technology Inc.

Inventor： Takashi Kobayashi

IPC: H01L41/08 ,  H03H9/21 ,  H01L41/09 ,  G04R60/00 ,  H03H9/215 ,  H03H9/10 ,  G04R20/10 ,  G04C3/12 ,  H03H3/02

CPC classification number: H01L41/09 ,  G04C3/12 ,  G04R20/10 ,  G04R60/00 ,  H03H9/1021 ,  H03H9/215 ,  H03H2003/026

Abstract: A piezoelectric vibrating piece, a piezoelectric vibrator, an oscillator, an electronic apparatus and a radio timepiece capable of reducing the size while suppressing reduction of rigidity and having excellent vibration characteristics. The piezoelectric vibrating piece includes a pair of vibrating arm portions in parallel to each other, a base portion integrally fixing base end portions of the pair of vibrating arm portions in a length direction, groove portions on main surfaces of the pair of vibrating arm portions and extending along the length direction, where each of the groove portions includes a first groove portion near a tip portion end of the vibrating arm portions and a second groove portion near the base end portion side of the vibrating arm portions with respect to the first groove portion, and the second groove portion is offset in a −X axis direction with respect to the first groove portion.

Abstract translation: 压电振动片，压电振动器，振荡器，电子设备和无线电钟表，能够在抑制刚度降低并且具有优异的振动特性的同时减小尺寸。 压电振动片包括彼此平行的一对振动臂部，将一对振动臂部的基端部沿长度方向整体固定的基部，一对振动臂部的主表面上的槽部， 沿长度方向延伸，其中每个凹槽部分包括在振动臂部分的尖端部分附近的第一凹槽部分和相对于第一凹槽部分在振动臂部分的基端部侧附近的第二凹槽部分 并且第二槽部相对于第一槽部在-X轴方向上偏移。

公开(公告)号：US20140254329A1

公开(公告)日：2014-09-11

申请号：US14202575

申请日：2014-03-10

Applicant: SII Crystal Technology Inc.

Inventor： Masanori TAMURA

IPC: H01L41/08 ,  H03B5/32 ,  H01L41/053 ,  G04R20/14

CPC classification number: H03H9/21 ,  G04R20/10 ,  H03B5/32

Abstract: A piezoelectric vibrating piece is provided including: a pair of vibrating arm sections; a base section which is provided between the pair of vibrating arm sections; and connecting sections which connect base end sections of the pair of vibrating arm sections and a base end section of the base section, in which the vibrating arm sections have bending points and the vibrating arm sections extend in a direction away from the base section from the base end sections of the vibrating arm sections to the bending points, and the vibrating arm sections extend along the base section from the bending points to leading end sections of the vibrating arm sections.

Abstract translation: 提供一种压电振动片，包括：一对振动臂部; 基部，设置在所述一对振动臂部之间; 以及连接部，其将所述一对振动臂部的基端部和所述基部的基端部连接，所述振动臂部具有弯曲点，所述振动臂部沿远离所述基部的方向延伸， 振动臂部的基端部到弯曲部，振动臂部从弯曲点向振动臂部的前端部沿基部延伸。

公开(公告)号：US20230172070A1

公开(公告)日：2023-06-01

申请号：US17987660

申请日：2022-11-15

Applicant: SII Crystal Technology Inc.

Inventor： Tomohiro MOMOSE

IPC: H01L41/047 ,  H01L41/113 ,  H01L41/09 ,  H01L41/293

CPC classification number: H01L41/0472 ,  H01L41/1132 ,  H01L41/094 ,  H01L41/293 ,  H03B5/32

Abstract: There are provided an excitation electrode, a quartz crystal vibrator element, a quartz crystal vibrator, a sensor, an oscillator, and a method of manufacturing a quartz crystal vibrator element which are not affected by heat in a process or a use environment to surely prevent a frequency fluctuation from occurring, reduction in size of which can be achieved, and which are low in cost and excellent in productivity. The excitation electrodes are disposed on an outer surface of a quartz crystal plate, apply an electrical field for exciting the quartz crystal plate to the quartz crystal plate, have a single layer structure formed of a two-dimensional layered substance, and are used when arranged as a pair so as to be opposed to each other via the quartz crystal plate.

公开(公告)号：US20220173717A1

公开(公告)日：2022-06-02

申请号：US17534913

申请日：2021-11-24

Applicant: SII Crystal Technology Inc.

Inventor： Takashi KOBAYASHI ,  Motoki SHIBUYA ,  Chisato OJIMA ,  Tomohiro MOMOSE

IPC: H03H9/19 ,  H03H3/04 ,  H03H9/05 ,  H03H9/10 ,  H03H9/13 ,  H03B5/32

Abstract: There is provided a piezoelectric vibrator element which is excellent in vibration characteristics, high in quality, and capable of suppressing a frequency fluctuation after a frequency adjustment. The piezoelectric vibrator element is provided with a piezoelectric plate having a pair of vibrating arm parts, an electrode film disposed on obverse and reverse surfaces of the piezoelectric plate, and weight metal films for a frequency adjustment disposed on the electrode film at the obverse surface side in the vibrating arm parts. The reverse surface of the vibrating arm part has a reverse side exposure part from which the piezoelectric plate is exposed. The obverse surface of the vibrating arm part has an obverse side exposure part from which the weight metal film and the electrode film are removed, and from which the piezoelectric plate is exposed. A whole of the obverse side exposure part overlaps the reverse side exposure part at a distance from the electrode film on the reverse surface viewed from a thickness direction of the piezoelectric plate.