公开(公告)号：US20220360250A1

公开(公告)日：2022-11-10

申请号：US17552254

申请日：2021-12-15

Applicant: Resonant Inc.

Inventor： Sean McHugh ,  Neal Fenzi ,  John Koulakis ,  Greg Dyer

IPC: H03H9/56 ,  H03H9/13 ,  H03H9/17

Abstract: Acoustic resonator devices, filters, and methods. An acoustic resonator includes a substrate and a piezoelectric plate, a portion of the piezoelectric plate being a diaphragm spanning a cavity in the substrate. A conductor pattern on a front surface of the piezoelectric plate includes concentric interleaved interdigital transducer (IDT) fingers connected alternately to first and second busbars. The IDT fingers are on the diaphragm.

公开(公告)号：US20220231659A1

公开(公告)日：2022-07-21

申请号：US17547113

申请日：2021-12-09

Applicant: Resonant Inc.

Inventor： Sean McHugh

IPC: H03H9/02 ,  H03H3/04 ,  H03H9/17 ,  H03H9/56

Abstract: Acoustic resonator devices and filters are disclosed. An acoustic resonator includes a substrate and a piezoelectric plate supported by the substrate. A portion of the piezoelectric plate suspended across a cavity in the substrate forms a diaphragm. A decoupling dielectric layer is on a front surface of the diaphragm. An interdigital transducer (IDT) has interleaved fingers on the decoupling dielectric layer over the diaphragm. The IDT and piezoelectric plate are configured such that a radio frequency signal applied to the IDT excites shear acoustic waves in the diaphragm.

公开(公告)号：US20220140801A1

公开(公告)日：2022-05-05

申请号：US17558112

申请日：2021-12-21

Applicant: Resonant Inc.

Inventor： Sean McHugh ,  Neal Fenzi

IPC: H03H9/02 ,  H03H9/17 ,  H03H3/02 ,  H03H9/56

Abstract: Acoustic resonator devices, filers, and methods. An acoustic resonator includes a substrate and a piezoelectric plate, a portion of the piezoelectric plate being a diaphragm spanning a cavity in the substrate. A conductor pattern on a front surface of the piezoelectric plate includes interleaved interdigital transducer (IDT) fingers connected alternately to first and second busbars. The interleaved IDT fingers are on the diaphragm, and the interleaved IDT fingers include at least a first pair of interleaved spiral IDT fingers.

公开(公告)号：US20220116019A1

公开(公告)日：2022-04-14

申请号：US17120028

申请日：2020-12-11

Applicant: Resonant Inc.

Inventor： Sean McHugh

IPC: H03H9/56 ,  H03H3/02 ,  H03H9/02 ,  H03H9/17

Abstract: Acoustic resonators and filter devices, and methods for making acoustic resonators and filter devices. An acoustic resonator includes a substrate having a surface and a single-crystal piezoelectric plate having front and back surfaces. The back surface is attached to the surface of the substrate except for a portion of the piezoelectric plate forming a diaphragm spanning a cavity in the substrate. A conductor pattern formed is formed on the front surface of the piezoelectric plate, including an interdigital transducer (IDT) with interleaved fingers of the IDT on the diaphragm. An insulating layer is formed between the piezoelectric plate and portions of the conductor pattern other than the interleaved fingers.

公开(公告)号：US20220109427A1

公开(公告)日：2022-04-07

申请号：US17362727

申请日：2021-06-29

Applicant: Resonant Inc.

Inventor： Andrew Guyette ,  Neal Fenzi ,  Greg Dyer ,  Sean McHugh

IPC: H03H9/54 ,  H03H9/13 ,  H03H9/17

Abstract: A radio frequency filter includes at least a first sub-filter and a second sub-filter connected in parallel between a first port and a second port. Each of the sub-filters has a piezoelectric plate having front and back surfaces, the back surface attached to a substrate, and portions of the piezoelectric plate forming diaphragms spanning respective cavities in the substrate. A conductor pattern is formed on the front surface of the plate, the conductor pattern includes interdigital transducers (IDTs) of a respective plurality of resonators, with interleaved fingers of each IDT disposed on a respective diaphragm of the plurality of diaphragms. A thickness of the portions of the piezoelectric plate of the first sub-filter is different from a thickness of the portions of the piezoelectric plate of the second sub-filter.

公开(公告)号：US20220109422A1

公开(公告)日：2022-04-07

申请号：US17364200

申请日：2021-06-30

Applicant: Resonant Inc.

Inventor： Andrew Guyette ,  Neal Fenzi ,  Greg Dyer ,  Sean McHugh

IPC: H03H9/205 ,  H03H9/02 ,  H03H9/56 ,  H03H3/02

Abstract: A radio frequency filter includes at least a first sub-filter and a second sub-filter connected in parallel between a first port and a second port. Each of the sub-filters has a piezoelectric plate having front and back surfaces, the back surface attached to a substrate, and portions of the piezoelectric plate forming diaphragms spanning respective cavities in the substrate. A conductor pattern is formed on the front surface of the plate, the conductor pattern includes interdigital transducers (IDTs) of a respective plurality of resonators, with interleaved fingers of each IDT disposed on a respective diaphragm of the plurality of diaphragms. A thickness of the portions of the piezoelectric plate of the first sub-filter is different from a thickness of the portions of the piezoelectric plate of the second sub-filter.

公开(公告)号：US09607119B1

公开(公告)日：2017-03-28

申请号：US15197510

申请日：2016-06-29

Applicant: RESONANT INC.

Inventor： Sean McHugh ,  Neal O. Fenzi

IPC: G06F17/50

CPC classification number: G06F17/5036 ,  G06F3/162 ,  G06F17/5009 ,  G06F17/504 ,  G06F17/5045 ,  G06F17/505 ,  G06F17/5063 ,  G06F2217/16 ,  G06F2217/80 ,  H03H3/08 ,  H03H9/465 ,  H03H9/542 ,  H03H9/605 ,  H03H9/6483 ,  H03H2003/0071

Abstract: A method of designing an acoustic microwave filter comprises generating a proposed filter circuit design having an acoustic resonant element with a defined admittance value, introducing a lumped capacitive element in parallel and a lumped inductive element in series with the resonant element, selecting a first capacitance value for the capacitive element and a first inductance value for the inductive element, thereby creating a first temperature modeled filter circuit design, simulating the first temperature modeled filter circuit design at a first operating temperature, thereby generating a first frequency response, selecting a second capacitance value for the capacitive element and a second inductance value for the inductive element, thereby creating a second temperature modeled filter circuit design, simulating the second temperature modeled filter circuit design at a second operating temperature, thereby generating a second frequency response, and comparing the first and second frequency responses to the frequency response requirements.

公开(公告)号：US20230016610A1

公开(公告)日：2023-01-19

申请号：US17944764

申请日：2022-09-14

Applicant: Resonant Inc.

Inventor： Sean McHugh ,  Kurt Raihn

IPC: H03H9/56 ,  H03H3/02 ,  H03H9/13

Abstract: An acoustic filter device includes first and second series resonators and at least one shunt resonator, each shunt resonator electrically coupled to the first series resonator or the second series resonator. Each of the first and second series resonators includes respective first and second sub-resonators electrically connected in series, The first sub-resonators of the first and second series resonators are acoustically coupled along a first shared acoustic track. The second sub-resonators of the first and second series resonators are acoustically coupled along a second shared acoustic track.

公开(公告)号：US20230006647A1

公开(公告)日：2023-01-05

申请号：US17940925

申请日：2022-09-08

Applicant: Resonant Inc.

Inventor： Andrew Guyette ,  Neal Fenzi ,  Greg Dyer ,  Sean McHugh

IPC: H03H9/205 ,  H03H9/02 ,  H03H3/02 ,  H03H9/56 ,  H03H9/13 ,  H03H9/17 ,  H03H9/54

Abstract: A radio frequency filter includes at least a first sub-filter and a second sub-filter connected in parallel between a first port and a second port. Each of the sub-filters has a piezoelectric plate having front and back surfaces, the back surface attached to a substrate, and portions of the piezoelectric plate forming diaphragms spanning respective cavities in the substrate. A conductor pattern is formed on the front surface of the plate, the conductor pattern includes interdigital transducers (IDTs) of a respective plurality of resonators, with interleaved fingers of each IDT disposed on a respective diaphragm of the plurality of diaphragms. A thickness of the portions of the piezoelectric plate of the first sub-filter is different from a thickness of the portions of the piezoelectric plate of the second sub-filter.

公开(公告)号：US20220393666A1

公开(公告)日：2022-12-08

申请号：US17842657

申请日：2022-06-16

Applicant: Resonant Inc.

Inventor： Viktor Plesski ,  Soumya Yandrapalli ,  Sean McHugh ,  Gregory L. Hey-Shipton ,  Garrett Williams ,  Ventsislav Yantchev ,  Andrew Guyette ,  Neal Fenzi ,  Jesson John ,  Bryant Garcia ,  Robert B. Hammond ,  Patrick Turner ,  Douglas Jachowski ,  Greg Dyer ,  Chris O'Brien ,  Andrew Kay ,  Albert Cardona ,  Dylan Kelly ,  Wei Yang ,  Marie Chantal Mukandatimana ,  Luke Myers

IPC: H03H9/56 ,  H03H9/02 ,  H03H9/13 ,  H03H9/17

Abstract: Filter devices are disclosed. A filter device includes a piezoelectric plate comprising a supported portion, a first diaphragm, and a second diaphragm. The supported portion is attached to a substrate and the first and second diaphragms spans respective cavities in the substrate. A first interdigital transducer (IDT) has interleaved fingers on the first diaphragm. A second interdigital transducer (IDT) has interleaved fingers on the second diaphragm. A first dielectric layer is between the interleaved fingers of the first IDT, and a second dielectric layer is between the interleaved fingers of the second IDT. A thickness of the first dielectric layer is greater than a thickness of the second dielectric layer. The piezoelectric plate and the first and second IDTs are configured such that radio frequency signals applied to first and second IDTs excite primary shear acoustic modes in the respective diaphragms.