Invention Grant
- Patent Title: High-electron-mobility transistor with buried interconnect
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Application No.: US16450513Application Date: 2019-06-24
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Publication No.: US10665711B2Publication Date: 2020-05-26
- Inventor: Ayman Shibib , Kyle Terrill , Yongping Ding , Jinman Yang
- Applicant: Vishay-Siliconix
- Applicant Address: US CA San Jose
- Assignee: VISHAY SILICONIX, LLC
- Current Assignee: VISHAY SILICONIX, LLC
- Current Assignee Address: US CA San Jose
- Main IPC: H01L29/778
- IPC: H01L29/778 ; H01L29/40 ; H01L21/02 ; H01L29/47 ; H01L29/205 ; H01L29/20 ; H01L29/06 ; H01L29/66 ; H01L21/768 ; H01L23/535 ; H01L29/423 ; H01L29/417 ; H01L29/10

Abstract:
A high-electron-mobility transistor (HEMT) includes a substrate layer of silicon, a first contact disposed on a first surface of the substrate layer, and a number of layers disposed on a second surface of the substrate layer opposite the first surface. A second contact and a gate contact are disposed on those layers. A trench containing conducting material extends completely through the layers and into the substrate layer. In an embodiment of the HEMT, the first contact is a drain contact and the second contact is a source contact. In another embodiment of the HEMT, the first contact is a source contact and the second contact is a drain contact.
Public/Granted literature
- US20190312137A1 HIGH-ELECTRON-MOBILITY TRANSISTOR WITH BURIED INTERCONNECT Public/Granted day:2019-10-10
Information query
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