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Invention Publication
CN102834908A 用于晶片清洁设备的盒夹具和具有该夹具的盒组件 失效 - 权利终止

用于晶片清洁设备的盒夹具和具有该夹具的盒组件
Abstract:
本发明提供了一种用于晶片清洁设备的盒夹具，包括：夹具本体，具有被设计成在内部接收第一晶片的内部空间；以及引导构件，安装在夹具本体中并且操作性地引导待安装在夹具本体中的盒，盒具有被设计成在内部接收具有比第一晶片相对小的直径的第二晶片的内部空间。
Abstract(English):

A cassette jig for a wafer cleaning apparatus is provided, comprising a jig body having an inner space designed to receive a first wafer therein; and a guide member mounted in the jig body and operative to guide a cassette to be installed in the jig body, the cassette having an inner space designed to receive a second wafer of a relatively smaller diameter than the first wafer therein.

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