公开(公告)号：US11948860B2

公开(公告)日：2024-04-02

申请号：US16642747

申请日：2017-08-29

Applicant: WELCON Inc.

Inventor： Yutaka Suzuki ,  Takashi Saito ,  Shingo Ikarashi

IPC: H01L23/473 ,  F28F3/12 ,  F28F13/06

CPC classification number: H01L23/4735 ,  F28F3/12 ,  F28F13/06

Abstract: A multilayer heat sink including a heat-receiving layer, a channel layer including cooling micropaths extending and directing a fluid in a direction orthogonal to a stacking direction, an orifice layer including jet orifices configured to jet the fluid into the cooling micropaths, and drain orifices configured to drain the fluid from the cooling micropaths, a header layer including a peripheral wall and a baffle, and a bottom layer, wherein the baffle includes parallel plates disposed parallel to each other, and end plates configured to alternately close an opening at an end and an opening at an opposite end of the parallel plates, and the orifice layer, the bottom layer, the baffle, and the peripheral wall define a supply channel to guide the fluid from a fluid inlet to the jet orifices and a drain channel to guide the fluid from the drain orifices to a fluid outlet.

公开(公告)号：US12211768B2

公开(公告)日：2025-01-28

申请号：US18590568

申请日：2024-02-28

Applicant: WELCON Inc.

Inventor： Yutaka Suzuki ,  Takashi Saito ,  Shingo Ikarashi

IPC: H01L23/473 ,  F28F3/12 ,  F28F13/06

Abstract: A heat sink is a multilayer cooler for cooling a contacting heat-generating element by flowing a coolant from a fluid inlet to a fluid outlet, and includes a heat-receiving plate, a channel plate, an orifice plate, a header plate, and a bottom plate stacked in this order from the top surface and bonded by diffusion bonding. The channel plate has many cooling micropaths arranged in a matrix. The orifice plate has jet orifices for jetting a coolant into the cooling micropaths and drain orifices for draining the coolant from the cooling micropaths. The header plate includes a baffle that separates the fluid inlet from the fluid outlet. The baffle includes a plurality of parallel plates and first end plates and second end plates that alternately close openings at an end and at the opposite end of the parallel plate. The baffle and the peripheral wall define a supply channel.

公开(公告)号：US12061053B2

公开(公告)日：2024-08-13

申请号：US17253576

申请日：2018-06-27

Applicant: WELCON INC.

Inventor： Yutaka Suzuki ,  Takashi Saito ,  Shingo Ikarashi

IPC: F28D7/16

CPC classification number: F28D7/1615

Abstract: A heat transport device comprises first flow passages through which a first fluid flows, and second flow passages through which a second fluid flows, wherein a cross-section A satisfying the following Requirement 1 to Requirement 3 can be achieved. Requirement 1 is that the cross-section A is a cross-section perpendicular to the second flow passages. Requirement 2 is that the holes of the second flow passages are disposed so as to be aligned in the left-right direction and to form layers in the up-down direction; and when comparing layers with holes adjacent in the up-down direction, the holes of the second flow passages are not disposed at the same position in the left-right direction. Requirement 3 is that the first flow passages exist between the layers with holes adjacent in the up-down direction, and the first flow passages meander in the up-down direction so as to avoid the holes of the second flow passages in the layers with holes that are sandwiched in the up-down direction.

公开(公告)号：US11384992B2

公开(公告)日：2022-07-12

申请号：US16642118

申请日：2017-08-29

Applicant: WELCON Inc.

Inventor： Yutaka Suzuki ,  Takashi Saito ,  Hiroaki Kimura ,  Shingo Ikarashi

IPC: F28F3/00 ,  F28D9/00 ,  F28F13/12

Abstract: A heat exchanger includes a first flow channel and a second flow channel that are alternately stacked in a stacking direction, each of the first flow channel and the second flow channel including: upstream parts disposed parallel to one another in a direction perpendicular to the stacking direction and to a direction in which the flow channels extend; downstream parts disposed parallel to one another in a direction perpendicular to the stacking direction and to a direction in which the flow channels extend; and branching/merging parts configured to branch the flow channels immediately upstream of the branching/merging parts into two divergent channels and merge the divergent channels adjacent to one another to form next flow channels, between the upstream parts and the downstream parts, wherein the branching/merging parts are provided in a plurality of stages between the upstream parts and the downstream parts.

公开(公告)号：US11959709B2

公开(公告)日：2024-04-16

申请号：US17253585

申请日：2018-06-27

Applicant: WELCON INC.

Inventor： Yutaka Suzuki ,  Takashi Saito ,  Shingo Ikarashi

IPC: F28F3/08 ,  F28D9/00 ,  F28D9/04 ,  F28F3/04 ,  F28F7/02

CPC classification number: F28F3/086 ,  F28D9/0025 ,  F28D9/0037 ,  F28D9/04 ,  F28F3/046 ,  F28F7/02

Abstract: A heat transport device comprises first flow passages through which a first fluid flows, and second flow passages through which a second fluid flows, wherein a cross-section A satisfying the following Requirement 1 to Requirement 3 can be achieved. Requirement 1 is that the cross-section A is a cross-section perpendicular to the second flow passages. Requirement 2 is that in the cross-section A, the holes of second flow passages are separated by meandering partition plates and are disposed in a layered manner. Two adjacent partition plates are a partition plate B and a partition plate C, and when comparing a point α, which is the top point of a mountain in the partition plate B closest to the partition plate C, and a point β, which is the bottom point of a valley in the partition plate C closest to the partition plate B, the point α is closer to the partition plate C side than the point μ. Requirement 3 is that the first flow passages are present inside the partition plates.

公开(公告)号：US11885017B2

公开(公告)日：2024-01-30

申请号：US17602801

申请日：2019-04-17

Applicant: WELCON INC.

Inventor： Yutaka Suzuki ,  Takashi Saito

IPC: C23C16/44 ,  C23C16/455 ,  C23C16/06 ,  C23C16/448 ,  C23C16/52

CPC classification number: C23C16/455 ,  C23C16/06 ,  C23C16/4481 ,  C23C16/4486 ,  C23C16/52

Abstract: A vaporizer is provided that is capable of heating source material mist under precise temperature management and thereby able to acquire a gas source material which can be adjusted to a prescribed temperature and which has a very low level of variation in temperature and that produces almost no precipitate. The vaporizer heats and vaporizes a source material mist to obtain a gas source material for film forming. The vaporizer comprises a main part formed from a metal material and having therein first flows path through which the source material mist flows and second flow paths through which a heating medium for heating the source material mist flows, the equivalent area circle diameter of the cross-section of the first flow paths is 5 mm or less while the equivalent area circle diameter of the cross-section of the second flow paths is 2 mm or less, and there are no gaps aside from the second flow paths between one of the first flow paths and another of the first flow paths adjacent thereto in the inside of the main part.