公开(公告)号：US10971342B2

公开(公告)日：2021-04-06

申请号：US16664207

申请日：2019-10-25

Applicant: TRUMPF Huettinger Sp. z o. o.

Inventor： Jan Peter Engelstaedter ,  Moritz Heintze ,  Jakub Swiatnicki

IPC: H01J37/32

Abstract: A power converter is capable to convert an electrical input power into a bipolar output power and to deliver the bipolar output power to at least two independent plasma processing chambers. The power converter includes: a power input port for connection to an electrical power delivering grid, at least two power output ports each for connection to one of the plasma processing chambers, and a controller configured to control delivering the bipolar output power to the power output ports, using at least one control parameter. The controller is configured to obtain a full set of desired values for the control parameter for the power output ports, calculate whether the power converter is capable of delivering every desired value to every output port, and if so, calculate a sequence of pulses of power delivery to the output ports to supply the power to plasma processes in the plasma processing chambers.

公开(公告)号：US20200066498A1

公开(公告)日：2020-02-27

申请号：US16664207

申请日：2019-10-25

Applicant: TRUMPF Huettinger Sp. z o. o.

Inventor： Jan Peter Engelstaedter ,  Moritz Heintze ,  Jakub Swiatnicki

IPC: H01J37/32

Abstract: A power converter is capable to convert an electrical input power into a bipolar output power and to deliver the bipolar output power to at least two independent plasma processing chambers. The power converter includes: a power input port for connection to an electrical power delivering grid, at least two power output ports each for connection to one of the plasma processing chambers, and a controller configured to control delivering the bipolar output power to the power output ports, using at least one control parameter. The controller is configured to obtain a full set of desired values for the control parameter for the power output ports, calculate whether the power converter is capable of delivering every desired value to every output port, and if so, calculate a sequence of pulses of power delivery to the output ports to supply the power to plasma processes in the plasma processing chambers.