公开(公告)号：US10916405B2

公开(公告)日：2021-02-09

申请号：US16562931

申请日：2019-09-06

Applicant: TOSHIBA MEMORY CORPORATION

Inventor： Takahiro Ikeda ,  Akira Kuramoto ,  Haruko Akutsu

IPC: H01J37/285 ,  H01J37/244 ,  H01J37/12 ,  H01J37/141 ,  H01J37/153

Abstract: According to one embodiment, an atom probe inspection device includes one or more processors configured to change a two-dimensional position of a detected ion, detect two-dimensional position information of the ion and a flying time of the ion, identify a type of an element of the ion, generate first information under a first condition and second information under a second condition, and generate a reconstruction image of the sample from the first information and the second information.

公开(公告)号：US10553416B2

公开(公告)日：2020-02-04

申请号：US15066749

申请日：2016-03-10

Applicant: TOSHIBA MEMORY CORPORATION

Inventor： Haruko Akutsu ,  Toma Yorisaki

IPC: H01J49/16 ,  H01J49/40

Abstract: A mass spectrometer includes a beam radiator radiating a beam to a sample. A laser radiator radiates laser light onto an irradiation surface of a surface of the sample irradiated with the beam or above the irradiation surface. The laser radiator splits the laser light into at least first light and second light. The laser radiator adjusts a polarization state, a length of an optical path, or a direction of the optical path of at least either the first light or the second light to condense the first light and the second light onto the irradiation surface or above the irradiation surface. A detector detects particles discharged from the sample.

公开(公告)号：US10345336B2

公开(公告)日：2019-07-09

申请号：US15252993

申请日：2016-08-31

Applicant: TOSHIBA MEMORY CORPORATION

Inventor： Jun Hirota ,  Tsukasa Nakai ,  Haruko Akutsu

IPC: G01Q60/30

Abstract: A scanning probe microscope that includes a probe, a positioning unit configured to position a probe on a measurement sample, an excitation unit configured to excite the measurement sample at a predetermined frequency, a resonance unit configured to output a frequency modulation signal by converting a change of a capacitance of the measurement sample, a lock-in amplifier configured to output a differential capacitance signal obtained by extracting a predetermined frequency component and a harmonic component of the predetermined frequency of the demodulated signal, a conversion unit configured to output data indicative of a relationship between a voltage applied to the measurement sample and the capacitance, a detecting unit that detects a voltage value corresponding to a feature point of the relationship data, and a main measurement control unit that measures electrical characteristics of the measurement sample subjected to a DC bias voltage substantially equal to the feature point voltage.