公开(公告)号：US10529606B2

公开(公告)日：2020-01-07

申请号：US15533173

申请日：2015-12-03

Applicant: RENA TECHNOLOGIES GMBH

Inventor： Stefan-Heinrich Hansen ,  Markus Uihlein ,  Bernd-Uwe Sander ,  Stephan Alexis Pediaditakis

IPC: H01L21/677

Abstract: A device treats substrates with a liquid, which device has a conveying device by which the substrates can be conveyed in a conveying direction through a container containing a liquid. A weir has an edge over which the substrates can run and which, at least in sections, extends obliquely relative to the conveying direction of the substrates. The weir is used in the device for treating substrates with a liquid. The weir has at least one edge which extends obliquely at least in sections.

公开(公告)号：US11823931B2

公开(公告)日：2023-11-21

申请号：US17585678

申请日：2022-01-27

Applicant: RENA TECHNOLOGIES GMBH

Inventor： Stefan-Heinrich Hansen ,  Markus Uihlein ,  Bernd-Uwe Sander ,  Stephan Alexis Pediaditakis

IPC: H01L21/677

CPC classification number: H01L21/67706

Abstract: A method for detaching a liquid lamella from a substrate edge is provided. A tear-off front is configured at at least one point of the liquid lamella. A width of the liquid lamella is then reduced by guiding the tear-off front along the substrate edge. Thus, the width of the liquid lamella prior to being torn off the substrate edge can be reduced by at least 50%, as compared to an original width of the liquid lamella.

公开(公告)号：US11270901B2

公开(公告)日：2022-03-08

申请号：US16695603

申请日：2019-11-26

Applicant: RENA TECHNOLOGIES GMBH

Inventor： Stefan-Heinrich Hansen ,  Markus Uihlein ,  Bernd-Uwe Sander ,  Stephan Alexis Pediaditakis

IPC: H01L21/677

Abstract: A device treats substrates with a liquid, which device has a conveying device by which the substrates can be conveyed in a conveying direction through a container containing a liquid. A weir has an edge over which the substrates can run and which, at least in sections, extends obliquely relative to the conveying direction of the substrates. The weir is used in the device for treating substrates with a liquid. The weir has at least one edge which extends obliquely at least in sections.

公开(公告)号：US20200098608A1

公开(公告)日：2020-03-26

申请号：US16695603

申请日：2019-11-26

Applicant: RENA TECHNOLOGIES GMBH

Inventor： Stefan-Heinrich Hansen ,  Markus Uihlein ,  Bernd-Uwe Sander ,  Stephan Alexis Pediaditakis

IPC: H01L21/677

Abstract: A device treats substrates with a liquid, which device has a conveying device by which the substrates can be conveyed in a conveying direction through a container containing a liquid. A weir has an edge over which the substrates can run and which, at least in sections, extends obliquely relative to the conveying direction of the substrates. The weir is used in the device for treating substrates with a liquid. The weir has at least one edge which extends obliquely at least in sections.

公开(公告)号：US12217990B2

公开(公告)日：2025-02-04

申请号：US16972258

申请日：2019-06-03

Applicant: RENA Technologies GmbH

Inventor： Benedikt Straub ,  Markus Uihlein ,  Florian Kaltenbach ,  Stephan Alexis Pediaditakis

IPC: H01L21/677 ,  B65G13/02 ,  H01L21/67 ,  H01L31/18

Abstract: In a method for treating objects, the objects are transported through a basin by a transporting device. Treatment solution is introduced into the basin by way of at least one feeding device, which is provided with upwardly directed outlet openings. The treatment solution is sprayed upwards by the upwardly directed outlet openings to form jets of treatment solution. The objects are transported through the basin over the upwardly directed outlet openings and a downwardly facing surface of the objects is brought into contact with the jets of treatment solution during the transport of the objects through the basin. There is also described a treatment apparatus for carrying out such a method.

公开(公告)号：US20210159105A1

公开(公告)日：2021-05-27

申请号：US16972258

申请日：2019-06-03

Applicant: RENA Technologies GmbH

Inventor： Benedikt Straub ,  Markus Uihlein ,  Florian Kaltenbach ,  Stephan Alexis Pediaditakis

IPC: H01L21/677 ,  H01L21/67 ,  B65G13/02

Abstract: In a method for treating objects, the objects are transported through a basin by a transporting device. Treatment solution is introduced into the basin by way of at least one feeding device, which is provided with upwardly directed outlet openings. The treatment solution is sprayed upwards by the upwardly directed outlet openings to form jets of treatment solution. The objects are transported through the basin over the upwardly directed outlet openings and a downwardly facing surface of the objects is brought into contact with the jets of treatment solution during the transport of the objects through the basin. There is also described a treatment apparatus for carrying out such a method.