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公开(公告)号:US11810620B2
公开(公告)日:2023-11-07
申请号:US17458067
申请日:2021-08-26
Applicant: KIOXIA CORPORATION
Inventor: Hiroyuki Takenaka , Akihiko Chiba , Teppei Higashitsuji , Kiyofumi Sakurai , Hiroaki Nakasa , Youichi Magome
CPC classification number: G11C16/14 , G11C5/06 , G11C16/0483 , G11C16/16 , G11C16/24 , G11C16/26 , G11C16/30
Abstract: A semiconductor storage device includes a first semiconductor substrate, a second semiconductor substrate, a first memory cell and a second memory cell provided between the first semiconductor substrate and the second semiconductor substrate, a first word line electrically connected to the first memory cell, a second word line electrically connected to the second memory cell, a first transistor that is provided on the first semiconductor substrate and electrically connected between the first word line and a first wiring through which a voltage is applied to the first word line, and a second transistor that is provided on the semiconductor substrate and electrically connected between the second word line and a second wiring through which a voltage is applied to the second word line.
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公开(公告)号:US11621278B2
公开(公告)日:2023-04-04
申请号:US17700951
申请日:2022-03-22
Applicant: KIOXIA CORPORATION
Inventor: Toshifumi Minami , Atsuhiro Sato , Keisuke Yonehama , Yasuyuki Baba , Hiroshi Shinohara , Hideyuki Kamata , Teppei Higashitsuji
IPC: H01L27/11582 , H01L27/11565 , H01L27/1157 , H01L27/11578 , H01L27/11551 , H01L29/792 , H01L27/11563 , H01L27/11556
Abstract: A semiconductor memory device includes a conducting layer and an insulating layer that are disposed above a semiconductor substrate, a plurality of pillars that extend in a direction which crosses a surface of the semiconductor substrate, and a plate that is disposed between the plurality of pillars and extends in the same direction as the pillars. A surface of the plate, which faces the pillars, has convex portions and non-convex portions.
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公开(公告)号:US12274065B2
公开(公告)日:2025-04-08
申请号:US18666035
申请日:2024-05-16
Applicant: Kioxia Corporation
Inventor: Toshifumi Minami , Atsuhiro Sato , Keisuke Yonehama , Yasuyuki Baba , Hiroshi Shinohara , Hideyuki Kamata , Teppei Higashitsuji
Abstract: A semiconductor memory device includes a conducting layer and an insulating layer that are disposed above a semiconductor substrate, a plurality of pillars that extend in a direction which crosses a surface of the semiconductor substrate, and a plate that is disposed between the plurality of pillars and extends in the same direction as the pillars. A surface of the plate, which faces the pillars, has convex portions and non-convex portions.
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公开(公告)号:US11315950B2
公开(公告)日:2022-04-26
申请号:US17021121
申请日:2020-09-15
Applicant: KIOXIA CORPORATION
Inventor: Toshifumi Minami , Atsuhiro Sato , Keisuke Yonehama , Yasuyuki Baba , Hiroshi Shinohara , Hideyuki Kamata , Teppei Higashitsuji
IPC: H01L27/11582 , H01L27/11565 , H01L27/1157 , H01L27/11578 , H01L27/11551 , H01L27/11563 , H01L27/11556 , H01L29/792
Abstract: A semiconductor memory device includes a conducting layer and an insulating layer that are disposed above a semiconductor substrate, a plurality of pillars that extend in a direction which crosses a surface of the semiconductor substrate, and a plate that is disposed between the plurality of pillars and extends in the same direction as the pillars. A surface of the plate, which faces the pillars, has convex portions and non-convex portions.
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公开(公告)号:US12183401B2
公开(公告)日:2024-12-31
申请号:US18480305
申请日:2023-10-03
Applicant: Kioxia Corporation
Inventor: Hiroyuki Takenaka , Akihiko Chiba , Teppei Higashitsuji , Kiyofumi Sakurai , Hiroaki Nakasa , Youichi Magome
Abstract: A semiconductor storage device includes a first semiconductor substrate, a second semiconductor substrate, a first memory cell and a second memory cell provided between the first semiconductor substrate and the second semiconductor substrate, a first word line electrically connected to the first memory cell, a second word line electrically connected to the second memory cell, a first transistor that is provided on the first semiconductor substrate and electrically connected between the first word line and a first wiring through which a voltage is applied to the first word line, and a second transistor that is provided on the semiconductor substrate and electrically connected between the second word line and a second wiring through which a voltage is applied to the second word line.
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公开(公告)号:US12022657B2
公开(公告)日:2024-06-25
申请号:US18176656
申请日:2023-03-01
Applicant: KIOXIA CORPORATION
Inventor: Toshifumi Minami , Atsuhiro Sato , Keisuke Yonehama , Yasuyuki Baba , Hiroshi Shinohara , Hideyuki Kamata , Teppei Higashitsuji
CPC classification number: H10B43/27 , H01L29/7926 , H10B41/20 , H10B41/27 , H10B43/00 , H10B43/10 , H10B43/20 , H10B43/35
Abstract: A semiconductor memory device includes a conducting layer and an insulating layer that are disposed above a semiconductor substrate, a plurality of pillars that extend in a direction which crosses a surface of the semiconductor substrate, and a plate that is disposed between the plurality of pillars and extends in the same direction as the pillars. A surface of the plate, which faces the pillars, has convex portions and non-convex portions.
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