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公开(公告)号:US10043869B2
公开(公告)日:2018-08-07
申请号:US15048182
申请日:2016-02-19
Applicant: Hanwha Techwin Co., Ltd.
Inventor: ChongHan Park , SeungMin Cho , SunAe Seo , SoMyeong Shin , TaeKwang Kim , SeonYeong Kim
IPC: H01L29/16 , H01L51/52 , H01L29/786 , H01L29/423 , H01L51/56 , H01L51/00 , H01L21/02
Abstract: Provided are a method of preparing a graphene-based thin-film laminate and the graphene-based thin-film laminate prepared by using the method. The method may include repeating following operations 60 times or less, the cycle including: (a) to (d) processes described above, a graphene-based thin-film laminate prepared using the same, and an electrode and electronic device including the graphene-based thin-film laminate.