Abstract:
Brightness-by-column grayscale and spatial Σ-Δ modulation grayscale allow grayscale patterns to be produced using a binary spatial light modulator as fast as the bright/dark switching speed.
Abstract:
Monolithic IC/MEMS processes are disclosed in which high-stress silicon nitride is used as a mechanical material while amorphous silicon serves as a sacrificial layer. Electronic circuits and micro-electromechanical devices are built on separate areas of a single wafer. The sequence of IC and MEMS process steps is designed to prevent alteration of partially completed circuits and devices by subsequent high process temperatures.
Abstract:
A chip-to-chip interconnect system suited for MEMS that do not require low-resistance connections is described. The interconnects may be fabricated simultaneously with MEMS ribbon structures such as are found in MEMS optical modulators.
Abstract:
A phase plate and lens modify light beams emitted by an array of lasers to form an efficient illumination source for a MEMS light modulator array. The phase of the electric field emitted by the lasers is modified such that the after passing through a lens the beam profile at the lens focal plane has an approximately rectangular shape appropriate for illuminating a light modulator array. The phase plate may be constructed from a glass plate with rectangular notches etched in it or with rectangular ridges formed on it. Furthermore a light source, such as a laser, may be coupled to an adiabatically tapered optical waveguide in which a phase adjusting block is introduced in analogy to notches in a bulk phase plate. Phase modified light beams output from the waveguide system have similar focusing properties to those passing through a bulk phase plate.
Abstract:
Micro-electromechanical light modulators are combined with anamorphic and contrast enhancing optical elements to form optical display engines. Linear MEMS arrays are suitable for the étendue of low divergence light sources while handling high optical power for brightness. The output of an optical engine is a line image which may be scanned to form a two-dimensional image.
Abstract:
A differential interferometric light modulator and image display system comprises a polarizing beam splitter, a polarization displacement device and a linear array of MEMS optical phase shifting devices to modulate a line image. The polarizing beam splitter acts as both the polarizer and the analyzer in an interferometer. The polarization displacement device divides polarized light from a polarizer into orthogonal polarization components which propagate parallel to one another. The MEMS optical phase shifting device array imparts a relative phase shift onto the polarization components and returns them to the polarization displacement device where they are recombined and sent to the analyzer. The MEMS optical phase shifting devices are electronically controlled and convert electronic image data into actual light modulation.
Abstract:
Micromachined grating modulators which exhibit achromatic behavior are described. One embodiment includes narrow and wide ribbons suspended above a substrate and alternatingly interleaved with each other. Narrow and wide reflective surfaces are formed on the narrow and wide ribbons. Compensating reflective surfaces are formed in the gaps between and beneath the ribbons. The width of the ribbons as well as the width of the gaps and the compensating reflecting surfaces are designed so that incident optical beam can be modulated or attenuated in an achromatic fashion.
Abstract:
An all-electrical high frequency contact sampling probe provides sub-micron spatial resolution and picosecond or sub-picosecond temporal resolution. In a preferred embodiment, the probe is a monolithic integration of a sampling circuit with a cantilever and probe tip, where the distance between the circuit and the tip is less than a wavelength of interest in an RF signal �V.sub.RF !. The sampling circuit �44! uses Schottky diodes �SD! for sampling the RF signal �V.sub.RF ! from a device under test at a rate determined by local oscillator signals �50, 52!. An IF signal �V.sub.IF ! produced by the sampling probe is an equivalent time representation of the RF signal. Applications include testing signals at interior nodes of high speed integrated circuits.