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公开(公告)号:US11380625B2
公开(公告)日:2022-07-05
申请号:US17009601
申请日:2020-09-01
Inventor: Soonheung Bae , Jyhwan Lee , Jaeshin Cho
IPC: H01L21/268 , H01L23/552 , H01L25/065
Abstract: A semiconductor package structure is provided. The semiconductor package structure includes a first device, a second device, and a shielding structure. The first device and the second device is one a first side of a substrate. The shielding structure includes a first portion and a second portion. The first portion is between the first device and the second device on the substrate, and the first portion includes a plurality of first shielding units arranged along a first direction. The second portion is between the first device and the second device, and the second portion includes a plurality of second shielding units arranged along a second direction different from the first direction. The second portion is configured as a first waveguide between the first device and the second device.