- Patent Title: Semiconductor device having a polarization super junction field effect transistor, electric equipment, bidirectional field effect transistor, and mounted structure body having the same
-
Application No.: US14890659Application Date: 2014-11-18
-
Publication No.: US09991335B2Publication Date: 2018-06-05
- Inventor: Shoko Echigoya , Fumihiko Nakamura , Shuichi Yagi , Souta Matsumoto , Hiroji Kawai
- Applicant: POWDEC K.K.
- Applicant Address: JP Tochigi
- Assignee: POWDEC K.K.
- Current Assignee: POWDEC K.K.
- Current Assignee Address: JP Tochigi
- Agency: K&L Gates LLP
- Priority: JP2014-085984 20140418
- International Application: PCT/JP2014/080436 WO 20141118
- International Announcement: WO2015/159450 WO 20151022
- Main IPC: H01L29/15
- IPC: H01L29/15 ; H01L29/06 ; H01L29/861 ; H01L29/778 ; H01L29/872 ; H01L29/205 ; H01L29/207 ; H01L29/739 ; H01L29/417 ; H01L29/423 ; H01L29/10 ; H01L29/20

Abstract:
Provided are a semiconductor device and a bidirectional field effect transistor which can easily overcome the tradeoff relation between the high voltage resistance and high speed in the semiconductor device using a polarization super junction, realize both the high voltage resistance and elimination of the occurrence of current collapse, operate at a high speed, and further the loss is low. The semiconductor device comprises a polarization super junction region and a p-electrode contact region. The polarization super junction region comprises an undoped GaN layer 11, an undoped AlxGa1-xN layer 12 with a thickness not smaller than 25 nm and not larger than 47 nm and 0.17≤x≤0.35, an undoped GaN layer 13 and a p-type GaN layer 14. When the reduced thickness tR is defined as tR=u+v(1+w×10−18) for the thickness u [nm] of the undoped GaN layer 13, the thickness v [nm] and the Mg concentration w [cm−3] of the p-type GaN layer 14, tR≥0.864/(x−0.134)+46.0 [nm] is satisfied. The p-electrode contact region comprises a p-type GaN contact layer formed to be in contact with the p-type GaN layer 14 and a p-electrode that is in contact with the p-type GaN contact layer.
Public/Granted literature
Information query
IPC分类: