Invention Grant
- Patent Title: Image sensor having improved dicing properties, manufacturing apparatus, and manufacturing method of the same
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Application No.: US15111003Application Date: 2015-01-26
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Publication No.: US09991301B2Publication Date: 2018-06-05
- Inventor: Atsushi Yamamoto , Shinji Miyazawa , Yutaka Ooka , Kensaku Maeda , Yusuke Moriya , Naoki Ogawa , Nobutoshi Fujii , Shunsuke Furuse , Masaya Nagata , Yuichi Yamamoto
- Applicant: SONY CORPORATION
- Applicant Address: JP Tokyo
- Assignee: Sony Corporation
- Current Assignee: Sony Corporation
- Current Assignee Address: JP Tokyo
- Agency: Sheridan Ross P.C.
- Priority: JP2014-012628 20140127; JP2014-258939 20141222
- International Application: PCT/JP2015/000329 WO 20150126
- International Announcement: WO2015/111419 WO 20150730
- Main IPC: H01L27/00
- IPC: H01L27/00 ; H01L27/146

Abstract:
The present technology relates to techniques of preventing intrusion of moisture into a chip. Various illustrative embodiments include image sensors that include: a substrate; a plurality of layers stacked on the substrate; the plurality of layers including a photodiode layer having a plurality of photodiodes formed on a surface of the photodiode layer; the plurality of layers including at least one layer having a groove formed such that a portion of the at least one layer is excavated; and a transparent resin layer formed above the photodiode layer and formed in the groove. The present technology can be applied to, for example, an image sensor.
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