Invention Grant
- Patent Title: Enhancement-mode III-nitride devices
- Patent Title (中): 增强型III族氮化物器件
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Application No.: US14714964Application Date: 2015-05-18
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Publication No.: US09590060B2Publication Date: 2017-03-07
- Inventor: Rakesh K. Lal
- Applicant: Transphorm Inc.
- Applicant Address: US CA Goleta
- Assignee: Transphorm Inc.
- Current Assignee: Transphorm Inc.
- Current Assignee Address: US CA Goleta
- Agency: Fish & Richardson P.C.
- Main IPC: H01L29/66
- IPC: H01L29/66 ; H01L29/423 ; H01L27/088 ; H01L29/78 ; H01L21/8252 ; H01L27/06 ; H01L27/085 ; H01L29/20 ; H01L29/40

Abstract:
A III-N enhancement-mode transistor includes a III-N structure including a conductive channel, source and drain contacts, and a gate electrode between the source and drain contacts. An insulator layer is over the III-N structure, with a recess formed through the insulator layer in a gate region of the transistor, with the gate electrode at least partially in the recess. The transistor further includes a field plate having a portion between the gate electrode and the drain contact, the field plate being electrically connected to the source contact. The gate electrode includes an extending portion that is outside the recess and extends towards the drain contact. The separation between the conductive channel and the extending portion of the gate electrode is greater than the separation between the conductive channel and the portion of the field plate that is between the gate electrode and the drain contact.
Public/Granted literature
- US20150263112A1 ENHANCEMENT-MODE III-NITRIDE DEVICES Public/Granted day:2015-09-17
Information query
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