Invention Grant
- Patent Title: Method of fabricating transient semiconductor based on single-wall nanotube
- Patent Title (中): 基于单壁纳米管制造瞬态半导体的方法
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Application No.: US15152121Application Date: 2016-05-11
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Publication No.: US09564319B2Publication Date: 2017-02-07
- Inventor: Sung-Hun Jin
- Applicant: INCHEON UNIVERSITY INDUSTRY ACADEMIC COOPERATION FOUNDATION
- Applicant Address: KR Incheon
- Assignee: Incheon University Industry Academic Cooperation Foundation
- Current Assignee: Incheon University Industry Academic Cooperation Foundation
- Current Assignee Address: KR Incheon
- Agency: Heslin, Rothenberg, Farley & Mesiti
- Agent George S. Blasiak
- Priority: KR10-2015-0082379 20150611
- Main IPC: H01L29/76
- IPC: H01L29/76 ; H01L21/02 ; H01L29/775 ; H01L29/778 ; H01L21/683 ; H01L21/3205 ; H01L21/285 ; H01L21/311 ; H01L21/3065 ; H01L29/06 ; H01L29/66

Abstract:
A method of fabricating a transient semiconductor based on a single-wall nanotube includes stacking a thermal oxide layer on a silicon substrate and depositing a nickel thin layer on the thermal oxide layer, depositing an oxide layer on the nickel thin layer, depositing a metallic layer on the oxide layer, and patterning the metallic layer to form a gate electrode, depositing a gate insulating layer on the gate electrode, changing a surface of the gate insulating layer into a hydrophilic surface, and washing and drying the gate insulting layer, coating a single-wall nanotube on the hydrophilic surface of the gate insulating layer, forming source and drain electrodes by forming a contact opening with respect to the gate insulating layer, attaching a thermal release tape after removing a surrounding single-wall nanotube, performing a transfer onto a polyvinyl alcohol thin layer after etching the nickel thin layer, and releasing the thermal release.
Public/Granted literature
- US20160365247A1 METHOD OF FABRICATING TRANSIENT SEMICONDUCTOR BASED ON SINGLE-WALL NANOTUBE Public/Granted day:2016-12-15
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