Invention Grant
- Patent Title: Semiconductor device and method for manufacturing semiconductor device
- Patent Title (中): 半导体装置及半导体装置的制造方法
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Application No.: US12051069Application Date: 2008-03-19
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Publication No.: US07973316B2Publication Date: 2011-07-05
- Inventor: Hideto Ohnuma
- Applicant: Hideto Ohnuma
- Applicant Address: JP
- Assignee: Semiconductor Energy Laboratory Co., Ltd.
- Current Assignee: Semiconductor Energy Laboratory Co., Ltd.
- Current Assignee Address: JP
- Agency: Husch Blackwell LLP
- Priority: JP2007-080376 20070326
- Main IPC: H01L21/46
- IPC: H01L21/46 ; H01L23/52 ; H01L27/088 ; H01L33/00

Abstract:
An object is to provide a semiconductor device which is not easily broken even if stressed externally and a method for manufacturing such a semiconductor device. A semiconductor device includes an element layer including a transistor in which a channel is formed in a semiconductor layer and insulating layers which are formed as an upper layer and a lower layer of the transistor respectively, and a plurality of projecting members provided at intervals of from 2 to 200 μm on a surface of the element layer. The longitudinal elastic modulus of the material for forming the plurality of projecting members is lower than that of the materials of the insulating layers.
Public/Granted literature
- US20080237805A1 Semiconductor Device and Method for Manufacturing Semiconductor Device Public/Granted day:2008-10-02
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