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US07706623B2 Image correcting method 有权
图像校正方法

Image correcting method
Abstract:
In a reticle inspecting apparatus or the like, there is provided an image correcting method which is effective when a rank of a matrix lacks due to continuous equal grayscale values when an image is handled as a matrix. In the image correcting method, a random noise image having fine grayscale is superposed on a pattern image to make a matrix full-rank.
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