公开(公告)号：US20100247085A1

公开(公告)日：2010-09-30

申请号：US12729307

申请日：2010-03-23

Applicant: Masataka Shiratsuchi ,  Yoshinori Honguh ,  Masatoshi Hirono ,  Riki Ogawa ,  Shinji Sugihara

Inventor： Masataka Shiratsuchi ,  Yoshinori Honguh ,  Masatoshi Hirono ,  Riki Ogawa ,  Shinji Sugihara

IPC: G03B13/00

CPC classification number: G03B13/00

Abstract: In an automatic focus adjusting mechanism, a test sample having a patterned surface is mounted on a mount table, and an light beam passing through a slit formed in a field stop is applied to the patterned surface of the test sample. The light beam reflected from the test sample is split into two segment light beams. Focus adjusting aperture stops having respective apertures formed rhomboid are provided across the optical paths of the segment light beams. The amounts of the segment light beams passing through the rhomboid apertures are detected by light receiving units. Based on the difference between the detected light amounts, the position of the mount table is controlled by the focus adjusting unit.

Abstract translation: 在自动聚焦调节机构中，将具有图案化表面的测试样品安装在安装台上，并且将通过形成在场停止器中的狭缝的光束施加到测试样品的图案化表面。 从测试样品反射的光束被分成两段光束。 在分段光束的光路上设置聚焦调节孔径，具有形成菱形的各个孔。 穿过菱形孔的分段光束的量由光接收单元检测。 基于检测到的光量之差，通过焦点调节单元来控制安装台的位置。

公开(公告)号：US07639863B2

公开(公告)日：2009-12-29

申请号：US11284186

申请日：2005-11-22

Applicant: Ikunao Isomura

Inventor： Ikunao Isomura

IPC: G06K9/00

CPC classification number: G06T7/001 ,  G06K9/00 ,  G06K2209/19 ,  G06T2207/30148

Abstract: A pattern inspection apparatus, including an optical image acquiring unit that acquires optical image data of a target plate to be inspected, the target plate being formed as a pattern. The pattern inspection apparatus also includes a design image data generating unit that generates design image data based on a design pattern serving as a base of pattern formation of the target plate. The pattern inspection apparatus further includes a comparing unit that inputs region image data generated based on information of a region pattern which is input to the pattern inspection apparatus. The information of the region pattern represents a predetermined region and is formed in the same format as that of information of the design pattern. The comparing unit compares the optical image data with the design image data based on the region image data.

Abstract translation: 一种图案检查装置，包括获取要检查的目标板的光学图像数据的光学图像获取单元，所述目标板形成为图案。 图案检查装置还包括设计图像数据生成单元，其基于用作目标板的图案形成的基础的设计图案来生成设计图像数据。 图案检查装置还包括比较单元，其输入基于输入到图案检查装置的区域图案的信息生成的区域图像数据。 区域图案的信息表示预定区域，并且形成为与设计图案的信息相同的格式。 比较单元基于区域图像数据将光学图像数据与设计图像数据进行比较。

公开(公告)号：US20090238441A1

公开(公告)日：2009-09-24

申请号：US12347345

申请日：2008-12-31

Applicant: Kyoji YAMASHITA

Inventor： Kyoji YAMASHITA

IPC: G06T7/00

CPC classification number: G06T7/001 ,  G06T2207/30148

Abstract: A pattern inspection apparatus includes a magnification conversion unit configured to input first sample optical image data, and to convert the first sample optical image data to second sample optical image data which has a resolution N times that of the first sample optical image data, a low-pass filter configured to input first design image data which has a resolution N times that of the first sample optical image data and in which a gray level value corresponding to the first sample optical image data is defined, and to calculate second design image data by convolving the first design image data with a predetermined low-pass filtering function, an optical filter configured to calculate third design image data by convolving the second design image data with a predetermined optical model function, a coefficient acquisition unit configured to acquire a coefficient of the predetermined optical model function by performing a predetermined calculation by using the second sample optical image data and the third design image data, an optical image acquisition unit configured to acquire actual optical image data of an inspection target workpiece on which a pattern is formed, a reference image data generation unit configured to generate reference image data corresponding to the actual optical image data by using the coefficient, and a comparison unit configured to input the actual optical image data, and to compare the actual optical image data with the reference image data.

Abstract translation: 图案检查装置包括：倍率转换单元，被配置为输入第一采样光学图像数据，并将第一采样光学图像数据转换成具有分辨率为第一采样光学图像数据的分辨率的N倍的第二采样光学图像数据，低 通过滤波器，被配置为输入具有第一样本光学图像数据的分辨率N倍的第一设计图像数据，并且其中定义了与第一样本光学图像数据对应的灰度值，并且通过以下步骤计算第二设计图像数据： 利用预定的低通滤波函数对第一设计图像数据进行卷积;滤波器，被配置为通过用预定的光学模型函数卷积第二设计图像数据来计算第三设计图像数据;系数获取单元，被配置为获取第一设计图像数据的系数， 通过使用第二样本光学Im执行预定的计算来预定的光学模型功能 年龄数据和第三设计图像数据，光学图像获取单元，被配置为获取其上形成图案的检查对象工件的实际光学图像数据;参考图像数据生成单元，被配置为生成与实际光学对应的参考图像数据 以及比较单元，被配置为输入实际的光学图像数据，并将实际的光学图像数据与参考图像数据进行比较。

公开(公告)号：US07577288B2

公开(公告)日：2009-08-18

申请号：US11287419

申请日：2005-11-28

Applicant: Kyoji Yamashita

Inventor： Kyoji Yamashita

IPC: G06K9/00

CPC classification number: G06T7/001 ,  G01N21/95607 ,  G03F1/84 ,  G06K9/6203 ,  G06T7/32 ,  G06T2207/30148

Abstract: A sample inspection apparatus according to an aspect of the present invention includes a first SSD calculating unit which calculates the displacement amount from a preliminary alignment position of an optical image and a reference image to a position where the SSD of a pixel value of the optical image and a pixel value of the reference image is minimized, and a least-square method calculating unit which calculates the displacement amount by a least-square method from the preliminary alignment position of the optical image and the reference image, wherein the alignment position of the optical image and the reference image is corrected to a position where the smaller SSD of the minimum SSD obtained as the result of the calculation by the first SSD calculating unit and the SSD obtained as the result of the calculation by the determined by the least-square method calculating unit is obtained.

Abstract translation: 根据本发明的一个方面的样本检查装置包括：第一SSD计算单元，其计算从光学图像的初步对准位置和参考图像到光学图像的像素值的SSD的位置的位移量 并且参考图像的像素值最小化;以及最小二乘法计算单元，其根据光学图像和参考图像的初步对准位置以最小二乘法计算位移量，其中， 光学图像和参考图像被校正为作为由第一SSD计算单元计算的结果获得的最小SSD的较小SSD和作为计算结果获得的SSD的位置，由最小二乘法确定的SSD 获得方法计算单元。

公开(公告)号：US07539350B2

公开(公告)日：2009-05-26

申请号：US11360584

申请日：2006-02-24

Applicant: Junji Oaki ,  Shinji Sugihara ,  Yuichi Nakatani

Inventor： Junji Oaki ,  Shinji Sugihara ,  Yuichi Nakatani

IPC: G06K9/40

CPC classification number: G06K9/748 ,  G06K9/03

Abstract: An image correction method having a small number of setting parameters achieved by integrating shift (alignment) in unit of a sub-pixel and image correction. A relationship between an inspection reference pattern image and a pattern image under test is identified, a mathematical expression model which fits a pixel error, expansion and contraction/distortion noise, and sensing noise of the image is constructed, and the model is simulated to generate an estimation model image.

Abstract translation: 一种通过以子像素为单位整合移位（对齐）和图像校正而实现的少量设定参数的图像校正方法。 识别检查参考图案图像和被测图案图像之间的关系，构建适合像素误差，扩张和收缩/失真噪声以及图像感测噪声的数学表达式模型，并且模拟模型以产生 估计模型图像。

公开(公告)号：US07539222B2

公开(公告)日：2009-05-26

申请号：US11278637

申请日：2006-04-04

Applicant: Kazuto Matsuki

Inventor： Kazuto Matsuki

IPC: H01S3/10

CPC classification number: G02F1/3525

Abstract: A method of operating a laser light source including a wavelength conversion device in which two wavelength laser beams are input to a nonlinear crystal to output a sum frequency wavelength, according to one embodiment includes inputting only one wavelength laser beam of the two input wavelength laser beams to the nonlinear crystal; measuring scattered light intensity of the one wavelength laser beam by a light sensitive sensor installed on an optical axis of the sum frequency wavelength output beam; and judging a damage state of the nonlinear crystal based on a measurement value obtained of the intensity measurement by the light sensitive sensor.

Abstract translation: 根据一个实施例的操作包括其中两个波长激光束被输入到非线性晶体以输出和频波长的波长转换装置的激光源的方法包括仅输入两个输入波长激光束的一个波长激光束 到非线性晶体; 通过安装在和频波长输出光束的光轴上的光敏传感器测量一个波长激光束的散射光强度; 以及基于由所述光敏传感器测量的强度测量值来判断所述非线性晶体的损伤状态。

公开(公告)号：US07495779B2

公开(公告)日：2009-02-24

申请号：US12031223

申请日：2008-02-14

Applicant: Riki Ogawa

Inventor： Riki Ogawa

IPC: G01B11/00 ,  G01B11/14 ,  G02B27/40

CPC classification number: G02B7/32 ,  G01N21/9501

Abstract: A level detection apparatus includes an illumination slit in which a rectangular first opening which causes illumination light to pass is formed, an optical system configured to illuminate a target object surface by illumination light passing through the illumination slit and focuses reflected light from the target object surface, first and second detection slits which are arranged in front of and in back of a focal point and in each of which a second opening is formed such that a short side of a rectangle is shorter than a short side of a illumination slit image formed by the illumination slit and a long side of the rectangle is larger than a long side of the illumination slit image, first and second light amount sensors configured to detect amounts of light of the reflected lights passing through the first and second detection slits, and a calculating unit configured to calculate a level of the target object surface based on outputs from the first and second light amount sensors.

Abstract translation: 电平检测装置包括形成有使得照明光通过的矩形第一开口的照明狭缝，被配置为通过照射光照射目标物体表面的光学系统，并且聚焦来自目标物体表面的反射光 第一和第二检测狭缝，其布置在焦点的前面和后面，并且每个检测狭缝形成有第二开口，使得矩形的短边短于由 所述照明狭缝和所述矩形的长边大于所述照明狭缝图像的长边，被配置为检测通过所述第一和第二检测狭缝的反射光的光量的第一和第二光量传感器，以及计算 被配置为基于来自第一和第二光量传感器的输出来计算目标物体表面的等级。

公开(公告)号：US20080239290A1

公开(公告)日：2008-10-02

申请号：US12047554

申请日：2008-03-13

Applicant: Toshiyuki WATANABE ,  Riki Ogawa

Inventor： Toshiyuki WATANABE ,  Riki Ogawa

IPC: G01N21/00

CPC classification number: G01N21/956 ,  G01N2021/95676 ,  G03F1/84

Abstract: A reticle defect inspection apparatus that can carry out a defect inspection with high detection sensitivity are provided. The apparatus includes an optical system of transmitted illumination for irradiating one surface of a sample with a first inspection light, an optical system of reflected illumination for irradiating another surface of the sample with a second inspection light, and a detecting optical system that can simultaneously detect a transmitted light obtained by the first inspection light being passed through the sample and a reflected light obtained by the second inspection light being reflected by the sample. And the optical system of transmitted illumination includes a focusing lens driving mechanism for correcting a focal point shift of the transmitted light resulting from thickness of the sample.

Abstract translation: 提供了能够进行高检测灵敏度的缺陷检查的掩模版缺陷检查装置。 该装置包括用于利用第一检查光照射样品的一个表面的透射照明的光学系统，用第二检查光照射样品的另一个表面的反射照明的光学系统，以及可以同时检测的检测光学系统 通过第一检查光通过样品而获得的透射光和由第二检查光获得的反射光被样品反射。 并且透射照明的光学系统包括用于校正由样品的厚度产生的透射光的焦点偏移的聚焦透镜驱动机构。

公开(公告)号：US20080050008A1

公开(公告)日：2008-02-28

申请号：US11567550

申请日：2006-12-06

Applicant: Junji Oaki

Inventor： Junji Oaki

IPC: G06K9/00 ,  G06K9/62

CPC classification number: G06T5/50 ,  G06T7/001 ,  G06T2207/20021 ,  G06T2207/30148

Abstract: A technique for correcting an image by using frequency division images and decomposition images corresponding in number to reference points is disclosed. An image correction apparatus includes an image divider which divides an inspection reference image into frequency regions to form frequency division images, a decomposition image generator for defining reference points at several locations within at least one frequency division image and for applying weighting with each reference point as a reference to thereby generate decomposition images corresponding in number to the reference points, a model parameter identifier for identifying a model parameter by using 2D linear prediction models of an image being tested, the decomposition images and a frequency division image which is out of the generation of decomposition images, and a model image generator for using the model parameter to generate a model image. An image inspection apparatus using the correction apparatus and an image correction method are also disclosed.

Abstract translation: 公开了一种通过使用频率分割图像和对应于参考点的分解图像来校正图像的技术。 图像校正装置包括图像分割器，其将检查参考图像分割成频率区域以形成分频图像;分解图像生成器，用于在至少一个分频图像内的若干位置处定义参考点，并且用每个参考点应用加权作为 从而生成与参考点相对应的分解图像的参考，用于通过使用被测图像的2D线性预测模型来识别模型参数的模型参数标识符，分解图像和不在生成中的分频图像 的分解图像，以及用于使用模型参数来生成模型图像的模型图像生成器。 还公开了一种使用该校正装置的图像检查装置和图像校正方法。

公开(公告)号：US20080037860A1

公开(公告)日：2008-02-14

申请号：US11692352

申请日：2007-03-28

Applicant: Kyoji YAMASHITA

Inventor： Kyoji YAMASHITA

IPC: G06K9/00

CPC classification number: G06K9/32 ,  G06T7/001 ,  G06T2207/30148

Abstract: A pattern inspection apparatus includes a first unit configured to acquire an optical image of pattern, a second unit configured to generate a reference image to be compared, a third unit configured to calculate elements of a normal matrix for a least-squares method for calculating a displacement amount displaced from a preliminary alignment position, a forth unit configured to estimate a type of the reference image pattern, by using some of the elements of the normal matrix, a fifth unit configured to calculate the displacement amount based on the least-squares method, by using a normal matrix obtained by deleting predetermined elements depending upon the type of the pattern, a sixth unit configured to correct an alignment position between the optical image and the reference image to a position displaced by the displacement amount, and a seventh unit configured to compare the optical image and the reference image.

Abstract translation: 图案检查装置包括：被配置为获取图案的光学图像的第一单元，被配置为生成要比较的参考图像的第二单元;第三单元，被配置为计算最小二乘法的正态矩阵的元素， 位移量从初步对准位置移位，第四单元，被配置为通过使用正常矩阵的一些元素来估计参考图像图案的类型;第五单元，被配置为基于最小二乘法来计算位移量 通过使用通过根据图案的类型删除预定元素而获得的正常矩阵，第六单元，被配置为将光学图像与参考图像之间的对准位置校正到偏移位移量的位置，以及第七单元配置 以比较光学图像和参考图像。