A target workpiece inspection apparatus comprises an optical image acquiring unit to acquire an optical image of a target workpiece, a reference image generating unit to generate a reference image to be compared, a difference judging unit to judge whether an absolute value of difference between pixel values of the images in each pixel at a preliminary alignment position between the images is smaller than a threshold value, a least-squares method displacement calculating unit to calculate a displacement amount displaced from the preliminary alignment position, by using a regular matrix for a least-squares method obtained from a result judged, a position correcting unit to correct an alignment position between the optical image and the reference image to a position displaced from the preliminary alignment position by the displacement amount, and a comparing unit to compare the optical image and the reference image whose alignment position has been corrected.