Invention Grant
- Patent Title: Bonding apparatus
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Application No.: US17602279Application Date: 2020-04-07
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Publication No.: US11749541B2Publication Date: 2023-09-05
- Inventor: Shigeyuki Sekiguchi , Yuji Eguchi , Kohei Seyama
- Applicant: SHINKAWA LTD.
- Applicant Address: JP Tokyo
- Assignee: SHINKAWA LTD.
- Current Assignee: SHINKAWA LTD.
- Current Assignee Address: JP Tokyo
- Agency: JCIPRNET
- Priority: JP 19075412 2019.04.11
- International Application: PCT/JP2020/015746 2020.04.07
- International Announcement: WO2020/209269A 2020.10.15
- Date entered country: 2021-10-07
- Main IPC: H01L21/67
- IPC: H01L21/67 ; H05K13/04 ; H01L23/00 ; H01L21/683

Abstract:
This bonding apparatus is provided with: a tape feeder module which takes out an electronic component from a carrier tape and transfers the electronic component thus taken out; a die supply module which has a die pick-up mechanism for picking up a semiconductor die from a semiconductor wafer bonded to a dicing sheet by pushing up the semiconductor die and which transfers the semiconductor die thus picked up; and a bonding module which arranges, on a circuit substrate, the semiconductor die supplied by the die supply module and/or the electronic component supplied by the tape feeder module.
Public/Granted literature
- US20220165591A1 BONDING APPARATUS Public/Granted day:2022-05-26
Information query
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