Invention Grant
- Patent Title: Semiconductor memory device
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Application No.: US17700951Application Date: 2022-03-22
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Publication No.: US11621278B2Publication Date: 2023-04-04
- Inventor: Toshifumi Minami , Atsuhiro Sato , Keisuke Yonehama , Yasuyuki Baba , Hiroshi Shinohara , Hideyuki Kamata , Teppei Higashitsuji
- Applicant: KIOXIA CORPORATION
- Applicant Address: JP Tokyo
- Assignee: KIOXIA CORPORATION
- Current Assignee: KIOXIA CORPORATION
- Current Assignee Address: JP Tokyo
- Agency: Kim & Stewart LLP
- Priority: JPJP2014-182641 20140908
- Main IPC: H01L27/11582
- IPC: H01L27/11582 ; H01L27/11565 ; H01L27/1157 ; H01L27/11578 ; H01L27/11551 ; H01L29/792 ; H01L27/11563 ; H01L27/11556

Abstract:
A semiconductor memory device includes a conducting layer and an insulating layer that are disposed above a semiconductor substrate, a plurality of pillars that extend in a direction which crosses a surface of the semiconductor substrate, and a plate that is disposed between the plurality of pillars and extends in the same direction as the pillars. A surface of the plate, which faces the pillars, has convex portions and non-convex portions.
Public/Granted literature
- US20220216232A1 SEMICONDUCTOR MEMORY DEVICE Public/Granted day:2022-07-07
Information query
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