Invention Grant
- Patent Title: Three-dimensional memory device and fabricating method thereof
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Application No.: US17012460Application Date: 2020-09-04
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Publication No.: US11437400B2Publication Date: 2022-09-06
- Inventor: Ziqi Chen , Guanping Wu
- Applicant: Yangtze Memory Technologies Co., Ltd.
- Applicant Address: CN Wuhan
- Assignee: Yangtze Memory Technologies Co., Ltd.
- Current Assignee: Yangtze Memory Technologies Co., Ltd.
- Current Assignee Address: CN Wuhan
- Agency: Sterne, Kessler, Goldstein & Fox P.L.L.C.
- Priority: CN201710773927.2 20170831
- Main IPC: H01L27/11582
- IPC: H01L27/11582 ; H01L21/033 ; H01L21/027 ; H01L21/311 ; H01L21/3105 ; H01L29/10 ; H01L21/768 ; H01L21/28 ; H01L21/02

Abstract:
Embodiments of through array contact structures of a 3D memory device and fabricating method thereof are disclosed. The method comprises: forming a recess region in a substrate including multiple protruding islands; forming a gate dielectric layer to cover top surfaces and sidewalls of the multiple protruding islands and a top surface of the recess region of the substrate; forming an underlying sacrificial layer on the gate dielectric layer to surround the sidewalls of the multiple protruding islands; forming an alternating dielectric stack including multiple alternatively stacked insulating layers and sacrificial layers on the underlying sacrificial layer and the multiple protruding islands; forming multiple channel holes penetrating the alternating dielectric stack, each channel hole is located corresponding to one of the multiple protruding islands; and forming a memory layer in each channel hole, wherein a channel layer of the memory layer is electrically connected with a corresponding protruding island.
Information query
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