Invention Grant
- Patent Title: Controlling multiple plasma processes
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Application No.: US16664207Application Date: 2019-10-25
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Publication No.: US10971342B2Publication Date: 2021-04-06
- Inventor: Jan Peter Engelstaedter , Moritz Heintze , Jakub Swiatnicki
- Applicant: TRUMPF Huettinger Sp. z o. o.
- Applicant Address: PL Zeilonka
- Assignee: TRUMPF Huettinger Sp. z o. o.
- Current Assignee: TRUMPF Huettinger Sp. z o. o.
- Current Assignee Address: PL Zeilonka
- Agency: Fish & Richardson P.C.
- Priority: EP17168576 20170427
- Main IPC: H01J37/32
- IPC: H01J37/32

Abstract:
A power converter is capable to convert an electrical input power into a bipolar output power and to deliver the bipolar output power to at least two independent plasma processing chambers. The power converter includes: a power input port for connection to an electrical power delivering grid, at least two power output ports each for connection to one of the plasma processing chambers, and a controller configured to control delivering the bipolar output power to the power output ports, using at least one control parameter. The controller is configured to obtain a full set of desired values for the control parameter for the power output ports, calculate whether the power converter is capable of delivering every desired value to every output port, and if so, calculate a sequence of pulses of power delivery to the output ports to supply the power to plasma processes in the plasma processing chambers.
Public/Granted literature
- US20200066498A1 CONTROLLING MULTIPLE PLASMA PROCESSES Public/Granted day:2020-02-27
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