Invention Grant
- Patent Title: Integrated circuit device
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Application No.: US17022619Application Date: 2020-09-16
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Publication No.: US10943904B2Publication Date: 2021-03-09
- Inventor: Min-seong Lee , Ju-youn Kim , Ji-hoon Yoon , Il-ryong Kim , Kyoung-hwan Yeo , Jae-yup Chung
- Applicant: Samsung Electronics Co., Ltd.
- Applicant Address: KR Suwon-si
- Assignee: Samsung Electronics Co., Ltd.
- Current Assignee: Samsung Electronics Co., Ltd.
- Current Assignee Address: KR Suwon-si
- Agency: Harness, Dickey & Pierce, P.L.C.
- Priority: KR10-2018-0041718 20180410
- Main IPC: H01L27/092
- IPC: H01L27/092 ; H01L29/78 ; H01L29/66 ; H01L29/51 ; H01L29/49 ; H01L29/06 ; H01L21/8238

Abstract:
An integrated circuit device includes a first fin separation insulating portion over the first device region; a pair of first fin-type active regions apart from each other with the first fin separation insulating portion therebetween and collinearly extending in a first horizontal direction; a first dummy gate structure vertically overlapping the first fin separation insulating portion; a second fin separation insulating portion apart from the first fin separation insulating portion and arranged over the second device region; and a plurality of second fin-type active regions apart from each other with the second fin separation insulating portion therebetween in the second device region and collinearly extending in the first horizontal direction, wherein a vertical level of a lowermost surface of the second fin separation insulating portion is equal to or lower than a vertical level of a lowermost surface of the first fin separation insulating portion.
Public/Granted literature
- US20210005606A1 INTEGRATED CIRCUIT DEVICE Public/Granted day:2021-01-07
Information query
IPC分类: