Invention Grant
- Patent Title: Atom probe inspection device, field ion microscope, and distortion correction method
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Application No.: US16562931Application Date: 2019-09-06
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Publication No.: US10916405B2Publication Date: 2021-02-09
- Inventor: Takahiro Ikeda , Akira Kuramoto , Haruko Akutsu
- Applicant: TOSHIBA MEMORY CORPORATION
- Applicant Address: JP Minato-ku
- Assignee: TOSHIBA MEMORY CORPORATION
- Current Assignee: TOSHIBA MEMORY CORPORATION
- Current Assignee Address: JP Minato-ku
- Agency: Oblon, McClelland, Maier & Neustadt, L.L.P.
- Priority: JP2019-042986 20190308
- Main IPC: H01J37/285
- IPC: H01J37/285 ; H01J37/244 ; H01J37/12 ; H01J37/141 ; H01J37/153

Abstract:
According to one embodiment, an atom probe inspection device includes one or more processors configured to change a two-dimensional position of a detected ion, detect two-dimensional position information of the ion and a flying time of the ion, identify a type of an element of the ion, generate first information under a first condition and second information under a second condition, and generate a reconstruction image of the sample from the first information and the second information.
Public/Granted literature
- US20200286711A1 ATOM PROBE INSPECTION DEVICE, FIELD ION MICROSCOPE, AND DISTORTION CORRECTION METHOD Public/Granted day:2020-09-10
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