Invention Grant
- Patent Title: Spacer for trench epitaxial structures
-
Application No.: US16423727Application Date: 2019-05-28
-
Publication No.: US10741559B2Publication Date: 2020-08-11
- Inventor: Injo Ok , Balasubramanian Pranatharthiharan , Soon-Cheon Seo , Charan V. V. S. Surisetty
- Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATION
- Applicant Address: CA Ottawa
- Assignee: ELPIS TECHNOLOGIES INC.
- Current Assignee: ELPIS TECHNOLOGIES INC.
- Current Assignee Address: CA Ottawa
- Agency: Roberts Calderon Safran & Cole, P.C.
- Agent Michael McCartney; Andrew M. Calderon
- Main IPC: H01L21/70
- IPC: H01L21/70 ; H01L27/092 ; H01L21/8238

Abstract:
The disclosure relates to a structure and methods of forming spacers for trench epitaxial structures. The method includes: forming a spacer material between source and drain regions of respective first-type gate structures and second-type gate structures; growing source and drain material about the first-type gate structures, confined within an area defined by the spacer material; and growing source and drain material about the second-type gate structures, confined within an area defined by the spacer material.
Public/Granted literature
- US20190296015A1 SPACER FOR TRENCH EPITAXIAL STRUCTURES Public/Granted day:2019-09-26
Information query
IPC分类: