Invention Grant
- Patent Title: Methods used in forming an array of memory cells
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Application No.: US16044703Application Date: 2018-07-25
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Publication No.: US10692887B2Publication Date: 2020-06-23
- Inventor: Werner Juengling
- Applicant: Micron Technology, Inc.
- Applicant Address: US ID Boise
- Assignee: Micron Technology, Inc.
- Current Assignee: Micron Technology, Inc.
- Current Assignee Address: US ID Boise
- Agency: Wells St. John P.S.
- Main IPC: H04L21/02
- IPC: H04L21/02 ; H01L21/28 ; H01L21/8234 ; H01L21/8239 ; H01L21/8242 ; H01L27/088 ; H01L27/1159 ; H01L27/11592 ; H01L29/78 ; G11C11/22 ; H01L27/108 ; H01L27/11507

Abstract:
In some embodiments, a method used in forming an array of memory cells comprises uses no more than two photolithographic masking steps are used in forming both: (a) sense lines longitudinally extending in a column direction that are individually directly above and electrically coupled to the upper source/drain regions of multiple of the second pedestals in the column direction; and (b) spaced elevationally-extending vias laterally between immediately-adjacent of the sense lines directly above and electrically coupled to the upper source/drain regions of multiple of the first pedestals. Other embodiments are disclosed.
Public/Granted literature
- US20190067303A1 Methods Used In Forming An Array Of Memory Cells Public/Granted day:2019-02-28
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