Invention Grant
- Patent Title: Supervisory control of radio frequency (RF) impedance tuning operation
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Application No.: US15846922Application Date: 2017-12-19
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Publication No.: US10666206B2Publication Date: 2020-05-26
- Inventor: David J. Coumou , Ross Reinhardt , Yuriy Elner , Daniel M. Gill
- Applicant: MKS Instruments, Inc.
- Applicant Address: US MA Andover
- Assignee: MKS Instruments, Inc.
- Current Assignee: MKS Instruments, Inc.
- Current Assignee Address: US MA Andover
- Agency: Harness, Dickey & Pierce, P.L.C.
- Main IPC: H03F1/56
- IPC: H03F1/56 ; H03F3/195 ; H03F3/24

Abstract:
A radio frequency (RF) control system including a RF generator having a power amplifier that outputs a RF signal and a controller. A matching network receives the RF signal and generates at least one RF output signal. In a first mode of operation, the controller enables adjustment of the frequency of the RF signal and a tune element of the matching network to achieve an impedance match and in a second mode of operation the controller enables adjustment of only the tune element of the matching network to achieve an impedance match while the frequency is adjusted to a target frequency. The RF controls system operates in a continuous and pulse mode of operation.
Public/Granted literature
- US20180109230A1 Supervisory Control of Radio Frequency (RF) Impedance Tuning Operation Public/Granted day:2018-04-19
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