Invention Grant
- Patent Title: Mass spectrometer performing mass spectrometry for sample with laser irradiation
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Application No.: US15066749Application Date: 2016-03-10
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Publication No.: US10553416B2Publication Date: 2020-02-04
- Inventor: Haruko Akutsu , Toma Yorisaki
- Applicant: TOSHIBA MEMORY CORPORATION
- Applicant Address: JP Tokyo
- Assignee: Toshiba Memory Corproation
- Current Assignee: Toshiba Memory Corproation
- Current Assignee Address: JP Tokyo
- Agency: Finnegan, Henderson, Farabow, Garrett & Dunner, L.L.P.
- Priority: JP2015-179921 20150911
- Main IPC: H01J49/16
- IPC: H01J49/16 ; H01J49/40

Abstract:
A mass spectrometer includes a beam radiator radiating a beam to a sample. A laser radiator radiates laser light onto an irradiation surface of a surface of the sample irradiated with the beam or above the irradiation surface. The laser radiator splits the laser light into at least first light and second light. The laser radiator adjusts a polarization state, a length of an optical path, or a direction of the optical path of at least either the first light or the second light to condense the first light and the second light onto the irradiation surface or above the irradiation surface. A detector detects particles discharged from the sample.
Public/Granted literature
- US20170076930A1 MASS SPECTROMETER Public/Granted day:2017-03-16
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