Invention Grant
- Patent Title: Sapphire substrate recycling method
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Application No.: US15450355Application Date: 2017-03-06
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Publication No.: US10283346B2Publication Date: 2019-05-07
- Inventor: Houyong Ma , Jing Ju , Zhengzhang You , Qiming Li , Jingchao Xie
- Applicant: ENRAYTEK OPTOELECTRONICS CO., LTD.
- Applicant Address: CN Shanghai
- Assignee: ENRAYTEK OPTOELECTRONICS CO., LTD.
- Current Assignee: ENRAYTEK OPTOELECTRONICS CO., LTD.
- Current Assignee Address: CN Shanghai
- Agency: Muncy, Geissler, Olds & Lowe, P.C.
- Priority: CN201610129077 20160308
- Main IPC: H01L21/02
- IPC: H01L21/02 ; C30B33/02 ; C30B29/20 ; C30B33/10 ; B08B3/08 ; B08B7/00 ; B08B7/04

Abstract:
A method for recycling a sapphire substrate is disclosed. The method includes the steps of: high-temperature baking, wherein an intact epitaxial wafer to be scrapped is placed and baked in a baking oven at a high temperature of from 600° C. to 1000° C., and wherein the epitaxial wafer contains the sapphire substrate; and high-temperature rinsing in a concentrated acid, wherein the baked epitaxial wafer is then rinsed in the concentrated acid having a concentration ranging from 60% to 99% at a high temperature of from 160° C. to 300° C. The method can be used for recycling both patterned and smooth sapphire substrates.
Public/Granted literature
- US20170263446A1 SAPPHIRE SUBSTRATE RECYCLING METHOD Public/Granted day:2017-09-14
Information query
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