Invention Grant
- Patent Title: Post zero via layer keep out zone over through silicon via reducing BEOL pumping effects
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Application No.: US15249700Application Date: 2016-08-29
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Publication No.: US10199315B2Publication Date: 2019-02-05
- Inventor: Mukta Ghate Farooq , John Matthew Safran
- Applicant: GLOBALFOUNDRIES Inc.
- Applicant Address: KY Grand Cayman
- Assignee: GLOBALFOUNDRIES INC.
- Current Assignee: GLOBALFOUNDRIES INC.
- Current Assignee Address: KY Grand Cayman
- Agency: Hoffman Warnick LLC
- Agent Anthony Canale
- Main IPC: H01L29/40
- IPC: H01L29/40 ; H01L23/498 ; H01L21/48 ; H01L23/48 ; H01L23/522 ; H01L23/532

Abstract:
An IC structure and related method are provided. The IC structure includes: a semiconductor substrate and a TSV disposed within the semiconductor substrate. A first interconnect layer includes a plurality of V0 vias disposed on the TSV, where the plurality of V0 vias are positioned laterally within an upper surface area of the TSV. At least one second interconnect layer disposed over the first interconnect layer includes a plurality of vias laterally positioned outside of a keep out zone positioned over the TSV. The method includes forming a first interconnect layer including a plurality of V0 vias disposed on a TSV, the V0 vias positioned laterally within an upper surface area of the TSV, and forming at least one second interconnect layer disposed over the first interconnect layer and including a plurality of vias laterally positioned outside of a keep out zone positioned over the TSV.
Public/Granted literature
- US20180061749A1 POST ZERO VIA LAYER KEEP OUT ZONE OVER THROUGH SILICON VIA REDUCING BEOL PUMPING EFFECTS Public/Granted day:2018-03-01
Information query
IPC分类: