公开(公告)号：US09274180B2

公开(公告)日：2016-03-01

申请号：US13987463

申请日：2013-07-29

Applicant: Benedikt Zeyen

Inventor： Benedikt Zeyen

IPC: G01R33/02 ,  G01R33/00

CPC classification number: G01R33/0052 ,  G01R33/0011 ,  Y10T29/4902

Abstract: A microfabricated magnetic field transducer uses a magnetically sensitive structure in combination with one or more permeable magnetic flux guides. The flux guides may route off-axis components of an externally applied magnetic field across the sensitive axis of the magnetically sensitive structure, or may shield the magnetically sensitive structure from off-axis, stray fields or noise sources. A combination of flux guides and magnetically sensitive structures arranged on a single substrate may enable an integrated, 3-axis magnetometer in a single package, greatly improving cost and performance.