Invention Grant
- Patent Title: Bulk acoustic wave resonator comprising a ring
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Application No.: US14526466Application Date: 2014-10-28
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Publication No.: US09991871B2Publication Date: 2018-06-05
- Inventor: Qiang Zou , Dariusz Burak
- Applicant: Avago Technologies General IP (Singapore) Pte. Ltd.
- Applicant Address: SG Singapore
- Assignee: Avago Technologies General IP (Singapore) Pte. Ltd.
- Current Assignee: Avago Technologies General IP (Singapore) Pte. Ltd.
- Current Assignee Address: SG Singapore
- Main IPC: H03H9/13
- IPC: H03H9/13 ; H03H9/15 ; H01L41/047 ; H01L41/053 ; H03H3/04 ; H03H9/17 ; H03H9/02

Abstract:
An acoustic resonator includes a first electrode disposed over a substrate; a piezoelectric layer disposed over the first electrode; and a second electrode disposed over the piezoelectric layer; a passivation layer disposed over the second electrode; and a ring disposed between the substrate and the passivation layer.
Public/Granted literature
- US20160126930A1 BULK ACOUSTIC WAVE RESONATOR COMPRISING A RING Public/Granted day:2016-05-05
Information query
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