Invention Grant
- Patent Title: Wafer-handling end effectors with wafer-contacting surfaces and sealing structures
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Application No.: US14631131Application Date: 2015-02-25
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Publication No.: US09991152B2Publication Date: 2018-06-05
- Inventor: Robbie Ingram-Goble , Michael E. Simmons , Philip Wolf , Ryan Garrison , Christopher Storm
- Applicant: CASCADE MICROTECH, INC.
- Applicant Address: US OR Beaverton
- Assignee: Cascade Microtech, Inc.
- Current Assignee: Cascade Microtech, Inc.
- Current Assignee Address: US OR Beaverton
- Agency: Dascenzo Intellectual Property Law, P.C.
- Main IPC: H01L21/683
- IPC: H01L21/683 ; B25J15/06 ; B25J11/00 ; B25J15/00 ; H01L21/677

Abstract:
Wafer-handling end effectors and semiconductor manufacturing devices that include and/or are utilized with wafer-handling end effectors are disclosed herein. The end effectors include an end effector body and a plurality of wafer-contacting surfaces that is supported by the end effector body and configured to form an at least partially face-to-face contact with a wafer. The end effectors further include a vacuum distribution manifold that extends between a robot-proximal end of the end effector body and the plurality of wafer-contacting surfaces. The end effectors also include a plurality of vacuum openings that is defined within the plurality of wafer-contacting surfaces and extends between the plurality of wafer-contacting surfaces and the vacuum distribution manifold. The end effectors further include a plurality of sealing structures each of which is associated with a respective one of the plurality of wafer-contacting surfaces.
Public/Granted literature
- US20150255322A1 WAFER-HANDLING END EFFECTORS Public/Granted day:2015-09-10
Information query
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