Invention Grant
- Patent Title: Systems and methods for fabricating single-crystalline diamond membranes
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Application No.: US15613396Application Date: 2017-06-05
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Publication No.: US09991113B2Publication Date: 2018-06-05
- Inventor: Jeehwan Kim , Dirk Robert Englund , Mark A. Hollis , Travis Wade , Michael Geis , Richard Molnar
- Applicant: Jeehwan Kim , Dirk Robert Englund , Mark A. Hollis , Travis Wade , Michael Geis , Richard Molnar
- Applicant Address: US MA Cambridge
- Assignee: Massachusetts Institute of Technology
- Current Assignee: Massachusetts Institute of Technology
- Current Assignee Address: US MA Cambridge
- Agency: Cooley LLP
- Main IPC: H01L21/20
- IPC: H01L21/20 ; H01L21/02 ; H01L21/306 ; H01L21/3213 ; H01L21/683 ; H01L29/04 ; H01L29/16
Abstract:
A buffer layer is employed to fabricate diamond membranes and allow reuse of diamond substrates. In this approach, diamond membranes are fabricated on the buffer layer, which in turn is disposed on a diamond substrate that is lattice-matched to the diamond membrane. The weak bonding between the buffer layer and the diamond substrate allows ready release of the fabricated diamond membrane. The released diamond membrane is transferred to another substrate to fabricate diamond devices, while the diamond substrate is reused for another fabrication.
Public/Granted literature
- US20170352538A1 Systems and Methods for Fabricating Single-Crystalline Diamond Membranes Public/Granted day:2017-12-07
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