Invention Grant
- Patent Title: Apparatus and method for correlating images of a photolithographic mask
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Application No.: US14568681Application Date: 2014-12-12
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Publication No.: US09990737B2Publication Date: 2018-06-05
- Inventor: Dieter Weber , Markus Waiblinger
- Applicant: Carl Zeiss SMT GmbH
- Applicant Address: DE Oberkochen
- Assignee: Carl Zeiss SMT GmbH
- Current Assignee: Carl Zeiss SMT GmbH
- Current Assignee Address: DE Oberkochen
- Agency: Fish & Richardson P.C.
- Priority: DE102013225936 20131213
- Main IPC: G06K9/00
- IPC: G06K9/00 ; G06T7/40 ; H01J37/26 ; G06T7/00 ; G06T11/60 ; G02B21/00 ; G01Q30/02 ; G01Q30/04 ; G06K9/46
Abstract:
An apparatus for correlating at least two images of a photolithographic mask that at least partially overlap, in which the apparatus includes a correlation unit that is provided to use at least one random variation, which is present in the at least two images, of at least one structural element of the photolithographic mask for the correlation of the at least two images.
Public/Granted literature
- US20150169997A1 APPARATUS AND METHOD FOR CORRELATING IMAGES OF A PHOTOLITHOGRAPHIC MASK Public/Granted day:2015-06-18
Information query
