Invention Grant
- Patent Title: Semiconductor device and method for fabricating the same
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Application No.: US15353163Application Date: 2016-11-16
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Publication No.: US09966446B2Publication Date: 2018-05-08
- Inventor: Yong Hee Park , Young Seok Song , Young Chul Hwang , Ui Hui Kwon , Keun Ho Lee , Jee Soo Chang , Jae Hee Choi
- Applicant: SAMSUNG ELECTRONICS CO., LTD.
- Applicant Address: KR Suwon-si, Gyeonggi-Do
- Assignee: SAMSUNG ELECTRONICS CO., LTD.
- Current Assignee: SAMSUNG ELECTRONICS CO., LTD.
- Current Assignee Address: KR Suwon-si, Gyeonggi-Do
- Agency: F. Chau & Associates, LLC
- Priority: KR10-2015-0167475 20151127
- Main IPC: H01L29/76
- IPC: H01L29/76 ; H01L29/417 ; H01L29/78 ; H01L23/532 ; H01L23/522 ; H01L29/66

Abstract:
There is provided a semiconductor device to enhance operating characteristics by reducing parasitic capacitance between a gate electrode and other nodes. The semiconductor device includes: a substrate including an active region, and a field region directly adjacent to the active region; a first fin-type pattern protruding from the substrate in the active region; a first gate electrode disposed on the substrate, intersecting with the first fin-type pattern and including a first portion and a second portion, the first portion intersecting with the first fin-type pattern; a second gate electrode disposed on the substrate, intersecting with the first fin-type pattern and including a third portion and a fourth portion, the fourth portion facing the second portion, and the third portion intersecting with the first fin-type pattern and facing the first portion; a first interlayer insulating structure disposed between the first portion and the third portion, being on the substrate, and having a first dielectric constant; and a second interlayer insulating structure disposed between the second portion and the fourth portion, being on the substrate, and having a second dielectric constant which is different from the first dielectric constant.
Public/Granted literature
- US20170154968A1 SEMICONDUCTOR DEVICE AND METHOD FOR FABRICATING THE SAME Public/Granted day:2017-06-01
Information query
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