Invention Grant
- Patent Title: Temporary bonding laminates for use in manufacture of semiconductor devices and method for manufacturing semiconductor devices
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Application No.: US14865755Application Date: 2015-09-25
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Publication No.: US09966295B2Publication Date: 2018-05-08
- Inventor: Ichiro Koyama , Yu Iwai , Kazuhiro Fujimaki
- Applicant: FUJIFILM Corporation
- Applicant Address: JP Tokyo
- Assignee: FUJIFILM Corporation
- Current Assignee: FUJIFILM Corporation
- Current Assignee Address: JP Tokyo
- Agency: Sughrue Mion, PLLC
- Priority: JP2013-064435 20130326
- Main IPC: H01L21/683
- IPC: H01L21/683 ; C09J4/00 ; C09J123/16 ; C09J125/14 ; H01L21/324

Abstract:
A temporary bonding laminate for use in the manufacture of semiconductor devices and a method for manufacturing semiconductor devices are provided. A member to be processed (a semiconductor wafer or the like) can be temporarily supported securely and readily during a mechanical or chemical process of the member, and then the processed member can be readily released from the temporary support without damaging the processed member even after a high temperature process. The laminate includes: (A) a release layer and (B) an adhesive layer. The release layer contains (a1) a compound being liquid at 25° C. and having a 5% mass reduction temperature of 250° C. or more when measured in a nitrogen gas stream under heating conditions of a constant heating rate of 20° C./min; and (a2) a binder having a 5% mass reduction temperature of 250° C. or more when measured under the same conditions.
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Information query
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