Invention Grant
- Patent Title: Stack packages having with confined underfill fillet and methods of manufacturing the same
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Application No.: US15677339Application Date: 2017-08-15
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Publication No.: US09966278B1Publication Date: 2018-05-08
- Inventor: Taehoon Kim , Hyun Kyu Ryu
- Applicant: SK hynix Inc.
- Applicant Address: KR Icheon-si, Gyeonggi-do
- Assignee: SK hynix Inc.
- Current Assignee: SK hynix Inc.
- Current Assignee Address: KR Icheon-si, Gyeonggi-do
- Agency: William Park & Associates Ltd.
- Priority: KR10-2017-0021105 20170216
- Main IPC: H01L21/56
- IPC: H01L21/56 ; H01L23/00 ; H01L25/00 ; H01L25/065 ; H01L23/31

Abstract:
There is provided a method of manufacturing a stack package. The method includes vertically stacking core dies on a base die wafer to provide a stack structure, forming partition walls on the base die wafer to surround the stack structure, and forming an underfill material layer that includes under-filling portions filling gaps between the core dies, and filling fillet portions covering side surfaces of the core dies. The fillet portions are formed to have a width confined by the partition walls. The partition walls are removed, and a mold layer is formed to cover the fillet portions. Related stack packages are also provided.
Information query
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