Invention Grant
- Patent Title: Forming nanotips
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Application No.: US15054005Application Date: 2016-02-25
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Publication No.: US09966253B2Publication Date: 2018-05-08
- Inventor: Kangguo Cheng , Ramachandra Divakaruni , Juntao Li , Shogo Mochizuki
- Applicant: International Business Machines Corporation
- Applicant Address: US NY Armonk
- Assignee: International Business Machines Corporation
- Current Assignee: International Business Machines Corporation
- Current Assignee Address: US NY Armonk
- Agency: Law Offices of Ira D. Blecker, P.C.
- Main IPC: H01L29/06
- IPC: H01L29/06 ; H01L21/02 ; H01J9/02 ; G01Q70/14 ; G01Q70/16
Abstract:
A nanotip apparatus which includes nanotips arranged in a pattern on a semiconductor base. Each of the nanotips have a pointed tip portion and a base portion in contact with the semiconductor base. Further, each of the nanotips include a gradient of silicon germanium (SiGe) with the highest concentration of germanium being at the pointed tip portion and the lowest concentration of germanium being at the base in contact with the semiconductor base. Also disclosed is a method in which the nanotips may be formed.
Public/Granted literature
- US20170250248A1 FORMING NANOTIPS Public/Granted day:2017-08-31
Information query
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