Invention Grant
- Patent Title: Cooling apparatus, illumination optical system, exposure apparatus, and method of manufacturing article
-
Application No.: US14960583Application Date: 2015-12-07
-
Publication No.: US09966245B2Publication Date: 2018-05-08
- Inventor: Kentaro Hiruma , Manato Furusawa , Noboru Osaka
- Applicant: CANON KABUSHIKI KAISHA
- Applicant Address: JP Tokyo
- Assignee: CANON KABUSHIKI KAISHA
- Current Assignee: CANON KABUSHIKI KAISHA
- Current Assignee Address: JP Tokyo
- Agency: Rossi, Kimms & McDowell LLP
- Priority: JP2014-249196 20141209
- Main IPC: G03F7/20
- IPC: G03F7/20 ; H01J61/52 ; G03F7/32 ; H01J61/86
Abstract:
A cooling apparatus for cooling a light source unit is provided. The cooling apparatus includes a cooling unit provided outside a path of light from the light source unit, and a heat pipe configured to connect a heat generating portion of the light source unit and the cooling unit. The heat pipe also serves as an electrode wire of the light source unit.
Public/Granted literature
- US20160163531A1 COOLING APPARATUS, ILLUMINATION OPTICAL SYSTEM, EXPOSURE APPARATUS, AND METHOD OF MANUFACTURING ARTICLE Public/Granted day:2016-06-09
Information query
IPC分类:
