Invention Grant
- Patent Title: Direct current pulsing plasma systems
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Application No.: US15368486Application Date: 2016-12-02
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Publication No.: US09966231B2Publication Date: 2018-05-08
- Inventor: Roderick W. Boswell , Richard Alan Gottscho
- Applicant: Lam Research Corporation
- Applicant Address: US CA Fremont
- Assignee: Lam Research Corporation
- Current Assignee: Lam Research Corporation
- Current Assignee Address: US CA Fremont
- Agency: Martine Penilla Group, LLP
- Main IPC: H01J7/24
- IPC: H01J7/24 ; H01J37/32 ; H02M3/335 ; H02M1/14 ; H01L21/3065

Abstract:
A plasma processing system is provided that includes a chamber having a lower electrode coupled to a substrate support and an upper electrode coupled to ground. The plasma processing system having a plasma processing volume that is defined between the upper electrode and the lower electrode. A direct current (DC) to direct current (DC) converter is provided to receive at an input a DC voltage input and supply at an output an amplified DC voltage signal that includes a radio frequency (RF) component. The DC voltage input follows a pulsing pattern that is digitally programmable. The output of the DC to DC convertor is connected to the lower electrode of the chamber. A controller is interfaced with the DC to DC converter to set the pulsing pattern. In one example, the DC to DC converter uses one of a bipolar or non-bipolar DC voltage supply and a RF generator is driven by a DC voltage supply. The RF generator is configured to produce a frequency ripple that defines the RF component.
Public/Granted literature
- US20170250056A1 Direct Current Pulsing Plasma Systems Public/Granted day:2017-08-31
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